Abstract:Abstract To enable accurate characterization of the mechanical behavior of materials at the micro-scale, e.g., in micro-systems, experiments are required that are representative of the actual (often multi-axial) loading conditions to which these materials are subjected during fabrication and operation. Equally important is the acquisition of mechanical data in the form of multi-axial force measurements, and the measurement of kinematics by in-situ microscopic techniques. To this end, a micro-mechanical testing rig is here realized using commercially available piezoelectric actuators. It is shown that the setup measures forces with a resolution of $\sim 0.3$ ∼ 0.3 [mN] in the x - and y -directions, and $\sim 50$ ∼ 50 [mN] in the z -direction, over a range of 5 [N], yielding a high dynamic (force) range. Furthermore, displacements can be imposed with a resolution of $\sim 1$ ∼ 1 [nm] over a range of 200 [ μ m], in all three directions ( x , y , z ). The setup is compact, vacuum compatible, and specimens are loaded on top of the setup so that the field of view is unobstructed, allowing for in-situ testing with optical and scanning electron microscopy, and optical profilometry. A generic method is developed for extracting quasi-static forces from the piezoelectric actuators. Furthermore, challenges raised from the use of commercial actuators, for which the public technical specifications are generally incomplete, are overcome and the solution strategy is described. Proof-of-concept experiments on flexible, organic, light-emitting diodes demonstrate the potential of the setup to provide rich micro-mechanical data in the form of tri-axial force and displacement measurements. The commercial availability of the piezoelectric actuators, combined with the proposed engineering solutions lead to a generally accessible micro-mechanical test setup to investigate small-scale specimens under realistic, multi-axial loading conditions.

An apparatus for measuring a material's photomechanical response

Design and Synthesis of a Well-Controlled Mechanoluminescent Polymer System Based on Fluorescence Resonance Energy Transfer with Spiropyran As a Force-Activated Acceptor and Nitrobenzoxadiazole As a Fluorescent Donor

An Accessible Instrument for Measuring Soft Material Mechanical Properties

Experimental Studies of the Mechanisms of Photomechanical Effects in a Nematic Liquid Crystal Elastomer in a Photomechanical Optical Device Geometry

An Apparatus for Measuring Mechanical Properties of Microstructures in Tensile Mode

Photodeformation Based Optomechanical Shell Actuators Applied to Vibration Control of Continua: A Sensitivity Study

An In-Situ, Micro-Mechanical Setup with Accurate, Tri-Axial, Piezoelectric Force Sensing and Positioning

A Novel Microindenter to Assess the Mechanical Properties of Soft Materials

Displacement Measurement of Soft Material Indentation using Light Intensity

Mechanical properties measurement of materials and devices at micro- and nano-scale by optical methods: A review

An Optical Probe Stage and Its Applications in Mechanical Behavior Measurements of Micro-Objects and Thin Films

Time-multiplexed laser self-mixing sensor for measurement of multiple material elastic moduli

Design of a Microscale Optomechanical Load Cell for Micro-/Nanostructured Materials Testing Applications

Experimental study on the dynamic mechanical response of a blue light-stimulated acrylate side chain liquid crystal elastomer

Mems/Nems Mechanical Characterization on Different Thin - Film Materials by Scanning along Micro-Machined Cantilevers

Mechanical Characterization Device For In Situ Measurement Of Nanomechanical Properties Of Micro/Nanostructures

A New Dynamic Device for Low-Dimensional Materials Testing

A mechanical micro molecular mass sensor

Accurate Vertical Nanoelectromechanical Measurements

An integrated push-to-pull micromechanical device: Design, fabrication, and in-situ experiment

Micro-mechanical Characterisation for MEMS Thin Films by Bending Μ-Machined Cantilevers