The influence of carbon content on the microstructure, mechanical and frictional property of chromium carbon nitride composite films

Chenkai Liu,Hongbo Ju,Peixian Han,Chundian Quan,ChangPan Mo,Yong Zhao,Yaoxiang Geng,Junhua Xu,Lihua Yu
DOI: https://doi.org/10.1016/j.vacuum.2020.109368
IF: 4
2020-08-01
Vacuum
Abstract:<p>In this paper, a series of chromium carbon nitride (CrCN) composite films with various carbon content were deposited by changing the power of carbon target using RF-reactive magnetron sputtering system in the argon and nitrogen mixture gases. The microstructure, mechanical and frictional properties of CrCN films were investigated by X-ray diffraction (XRD), Raman spectrometer, X-ray photoelectron spectroscopy (XPS), transmission electron microscopy (TEM), nanoindentation and friction tester. According to the experimental results, the deposited binary CrN film exhibited a single face-centered cubic (fcc) structure, whereas the addition of carbon into the CrN matrix induced the formation of other phases of carbon and CN<sub>x</sub>. Both the solid solution strengthening and the increase of compressive residual stress improved the hardness from ∼17 GPa at 0 at.% carbon to ∼19 GPa at 6.3 at.% carbon. With the increase of C content, the friction curve of the CrCN film stabilized gradually and the average friction coefficient decreased gradually from 0.62 at 0 at.% carbon to 0.40 at 23.7 at.% carbon. The formation of lubricating amorphous carbon and CN<sub>x</sub> phase in the films mainly attributed to the improvement of friction property.</p>
materials science, multidisciplinary,physics, applied
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