Low-temperature wafer-scale fabrication of carbon nanotube network TFT: Geometry effect and transport mechanism

Hsiao-Yu Chang,B. Tsui
DOI: https://doi.org/10.1109/INEC.2011.5991666
2011-06-21
Abstract:In this work, we propose a simple method to form uniform carbon nanotube network (CNTN) in wafer-scale, which is completely compatible to thin-film transistors (TFTs) process and can achieve large-area uniformity and stable device performance. From the plot of on-current versus off-current, it is clear that devices with various dimensions are divided into two groups, and the threshold value for these two groups was determined by device dimension compared to the length of CNT. The transport mechanisms of the CNTN TFTs of on-state and off-state identified by temperature-dependent measurement are thermal emission and band-to-band tunneling, respectively.
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