Improvement of the electrical property of semi-insulating InP by suppression of compensation defects

Y. Zhao,Z. Dong
DOI: https://doi.org/10.1109/ICIPRM.2005.1517445
2005-05-08
Abstract:Semi-insulating (SI) InP obtained by iron phosphide ambient annealing has very low concentration of deep level defects and better electrical property than SI-InP annealed in phosphorus ambient. The defect suppression phenomenon correlates with Fe diffusion and substitution in the annealing process. Analysis of the experimental result suggests that a high activation ratio of incorporated Fe in InP has an effect of defect suppression in Fe-doped and Fe-diffused SI-InP.
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