Imprint master fabricated by ultra precision machining for optical waveguide

W. Lee,J. Lim,S. Hwang,B. Rho
DOI: https://doi.org/10.1109/OECCACOFT.2008.4610365
2008-07-07
Abstract:An imprint master was fabricated by ultra precision machining (UPM) for optical waveguide. And we manufactured multimode waveguides using a thermal imprint method and the UPM master. We found that the master was suitable for an optical waveguide because it had a simple process and a fine surface profile.
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