Abstract:Microelectronic integration is a key enabler for the ubiquitous deployment of devices in large volumes ranging from MEMS and imaging sensors to consumer electronics. Such integration has also been achieved in photonics, where compact optical transceivers for data centers employ co-integrated photonic and electronic components. Chip-scale integration is of particular interest to coherent laser ranging i.e. frequency modulated continuous wave (FMCW LiDAR), a perception technology that benefits from instantaneous velocity and distance detection, eye-safe operation, long-range and immunity to interference. Full wafer-scale integration of this technology has been compounded by the stringent requirements on the lasers, requiring high optical coherence, low chirp nonlinearity and requiring optical amplifiers. Here, we overcome this challenge and demonstrate a photonic-electronic integrated circuit-based coherent LiDAR engine, that combined all functionalities using fully foundry-compatible wafer scale manufacturing. It is comprised of a micro-electronic based high voltage arbitrary waveform generator, a hybrid photonic circuit based tunable Vernier laser with piezoelectric actuators, and an erbium-doped waveguide optical amplifier - all realized in a wafer scale manufacturing compatible process that comprises III-V semiconductors, SiN silicon nitride photonic integrated circuits as well as 130nm SiGe BiCMOS technology. The source is a turnkey, linearization-free, and can serve as a 'drop-in' solution in any FMCW LiDAR, that can be seamlessly integrated with an existing focal plane and optical phased array LiDAR approaches, constituting a missing step towards a fully chip-scale integrated LiDAR system.

Low-pixel-count imaging FMCW lidar

Low-Resolution Imaging FMCW Lidar

A 16-Channel Analog CMOS SiPM with On-Chip Front-End for D-ToF LiDAR

Massively parallel FMCW lidar with cm range resolution using an electro-optic frequency comb

Hybrid Integrated Ultralow-Linewidth and Fast-Chirped Laser for FMCW LiDAR

A microcomb-empowered Fourier domain mode-locked LiDAR

A Fully Solid-State Beam Scanner for FMCW LiDAR Application

Laser Feedback Frequency-Modulated Continuous-Wave LiDAR and 3-D Imaging.

Coherent Optical Modems for Full-Wavefield Lidar

A Pulsed-Coherent Lidar With Sub-10 μm Precision

High Resolution Parallel Coherent Laser Ranging Using an EO Frequency Comb

Linearization of wavelength sweeping lasers for the construction of 4-D FMCW LiDAR images of slow-moving objects using baseband beat note signals

Microcavity Raman Laser-Based FMCW LiDAR with Enhanced Echo Sensitivity

Synchronous measurement of velocity and distance with high resolution based on comb reference common-path interferometric FMCW lidar

Silicon photonic integrated FMCW coherent LIDAR receiving chip

Photonic-electronic integrated circuit-based coherent LiDAR engine

Long-range High-Speed Laser Imaging Based on VCSEL Array and MPPC Array.

Real-time high-precision FMCW laser range extraction method based on a hardware multiplier array

Video-rate high-precision time-frequency multiplexed 3D coherent ranging

High SNR signal processing system for coherent solid-state LIDAR with silicon photonic balanced photodetector array

Time-multiplexing single-photon imaging lidar with single-pixel detector