Electron beam machining system

周段亮,姜开利,林晓阳,范守善,张春海,柳鹏,赵伟
2016-06-08
Abstract:The invention relates to an electron beam machining system. The electron beam machining system comprises a vacuum device, an electron gun, an object bearing device, a control computer and a diffraction device, wherein the electron gun is arranged in the vacuum device, and is used for emitting an electron beam; the object bearing device is arranged in the vacuum device, and is used for bearing an object to be machined; the control computer is used for controlling operation of the entire electron beam machining system; the diffraction device is arranged in the vacuum device, and comprises a two-dimensional nanomaterial; the electron beam emitted by means of the electron gun transmits the two-dimensional nanomaterial to form a transmission electron beam and a plurality of diffraction electron beams; and the transmission electron beam and the plurality of diffraction electron beams radiate the surface of the object to be machined, so as to form a transmission spot and a plurality of diffraction spots. The electron beam machining system provided by the invention diffracts an electron beam into a plurality of electron beams by using an electron beam diffraction device, thereby reducing the cost and improving the working efficiency.
Engineering,Materials Science,Physics
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