Abstract:MiniCACTUS is a monolithic sensor prototype optimised for timing measurement of charged particles. It has been designed in a standard 150 nm CMOS process without dedicated amplification layer. It is intended as a demonstrator chip for future large scale timing detectors, like upgrades of timing detectors at LHC, or future high energy physics detector projects. The sensor features an active array of 2 x 4 diodes, analog and digital Front-Ends (FEs), a slow control interface, and bias circuitry programmable through internal DACs. The sensing element is a deep n-well/p-substrate diode. Thanks to the optimized guard-rings surrounding the whole chip, it is possible to apply safely more than 450 V on the high-resistivity substrate allowing fast charge collection. The baseline pixel dimensions are 1.0 mm x 1.0 mm and 0.5 mm x 1.0 mm. The analog FEs and the discriminators for each pixel are implemented outside the pixel, at the column level. The power consumption is approximately 300 mW/cm$\mathbf {^2}$, which is compatible with cooling infrastructure available at LHC experiments, and making integration of this concept viable in future high energy physics experiments. After fabrication, the sensors have been thinned to 100 $\mu$m, 200 $\mu$m and 300 $\mu$m total thickness and then post-processed for backside biasing. The time resolution of several sensors with different thicknesses has been measured in 3 test-beam campaigns using high energy muons (Minimum Ionizing Particles) at CERN SPS in 2021 and 2022. A resolution of 65.3 ps has been measured with on-chip FE and discriminator. This paper will focus on the results of these test-beam campaigns.

A Time-Based Electronic Front-End for a Capacitive Particle Matter Detector

A Novel Triangular-Electrode Based Capacitive Sensing Method for MEMS Resonant Devices

A Low Excitation Working Frequency Capacitively Coupled Contactless Conductivity Detection (C4D) Sensor for Microfluidic Devices

Ultrasensitive charge detection utilizing coupled nonlinear micromechanical resonators

A Surface Acoustic Wave-Based PM 1.0 Fine Dust Detection System Using Full Digital Time-Interleaved Counters

A Flexible Capacitive Tactile Sensor Array with High Scanning Speed for Distributed Contact Force Measurements

A miniature system for particulate matter (PM) measurement

Particle Detector Readout Integrated Circuit of 0.18 Mu M Technology with 164 E Equivalent Noise Charge

50.3 ps time resolution and an 11-channel time measuring chip for Topmetal detectors

Low-Frequency RFID Signal and Power Transfer Circuitry for Capacitive and Resistive Mixed Sensor Array

A Capacitance-To-Digital Converter for MEMS Sensors for Smart Applications

Particle Detector Readout Integrated Circuit of 0.18μm Technology with 164 E Equivalent Noise Charge

MiniCACTUS: A 65 ps Time Resolution Depleted Monolithic CMOS Sensor

A Capacitive Pressure Sensor Based on LTCC/PDMS Bonding Technology

A Wide Measurement Range and Fast Update Rate Integrated Interface for Capacitive Sensors Array

Design of a Digitized Vibration Detector Implemented by CMOS Digitized Capacitive Transducer with In-Plane SoI Accelerometer

Capacitance-to-digital: the upgrades of single chip detector

Fully Depleted Monolithic Active Microstrip Sensors: TCAD simulation study of an innovative design concept

A Digital-Analog Hybrid System-on-Chip for Capacitive Sensor Measurement and Control.

Interface Circuit for Capacitive Microaccelerometer

Interdigital Capacitor-Based Passive LC Resonant Sensor for Improved Moisture Sensing