The effects of corticosteroids on immunoregulation in sarcoidosis.

P. Katz,A. Fauci

DOI: https://doi.org/10.1016/0008-8749(79)90196-5

IF: 4.178

1979-02-01

Cellular Immunology

Abstract:

What problem does this paper attempt to address?

Single Optical Microfiber Enabled Tactile Sensor for Simultaneous Temperature and Pressure Measurement

Ni Yao,Xiaoyu Wang,Shuqi Ma,Xingda Song,Shan Wang,Zhangxing Shi,Jing Pan,Shipeng Wang,Jianliang Xiao,Haitao Liu,Longteng Yu,Yao Tang,Zhang,Xiong Li,Wei Fang,Lei Zhang,Limin Tong

DOI: https://doi.org/10.1364/prj.461182

IF: 7.6

2022-01-01

Photonics Research

Abstract:The ability to sense heat and touch is essential for healthcare, robotics, and human–machine interfaces. By taking advantage of the engineerable waveguiding properties, we design and fabricate a flexible optical microfiber sensor for simultaneous temperature and pressure measurement based on theoretical calculation. The sensor exhibits a high temperature sensitivity of 1.2 nm/°C by measuring the shift of a high-order mode cutoff wavelength in the short-wavelength range. In the case of pressure sensing, the sensor shows a sensitivity of 4.5% per kilopascal with a fast temporal frequency response of 1000 Hz owing to the strong evanescent wave guided outside the microfiber.The cross talk is negligible because the temperature and pressure signals are measured at different wavelengths based on different mechanisms. The properties of fast temporal response, high temperature, and pressure sensitivity enable the sensor for real-time skin temperature and wrist pulse measurements, which is critical to the accurate analysis of pulse waveforms. We believe the sensor will have great potential in wearable optical devices ranging from healthcare to humanoid robots.
A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application

Suwei Wang,Jun Wang,Wenhao Li,Yangyang Liu,Jiashun Li,Pinggang Jia

DOI: https://doi.org/10.3390/mi13050763

IF: 3.4

2022-05-13

Micromachines

Abstract:In this paper, a high-fineness fiber-optic Fabry–Perot high-temperature pressure sensor, based on MEMS technology, is proposed and experimentally verified. The Faber–Perot cavity of the pressure sensor is formed by the anodic bonding of a sensitive silicon diaphragm and a Pyrex glass; a high-fineness interference signal is obtained by coating the interface surface with a high-reflection film, so as to simplify the signal demodulation system. The experimental results show that the pressure sensitivity of this sensor is 55.468 nm/MPa, and the temperature coefficient is 0.01859 nm/°C at 25~300 °C. The fiber-optic pressure sensor has the following advantages: high fineness, high temperature tolerance, high consistency and simple demodulation, resulting in a wide application prospect in the field of high-temperature pressure testing.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
High-temperature fiber-tip pressure sensor

Yizheng Zhu,Kristie L. Cooper,Gary R. Pickrell,Anbo Wang,K.L. Cooper,G.R. Pickrell

DOI: https://doi.org/10.1109/jlt.2005.862444

IF: 4.7

2006-02-01

Journal of Lightwave Technology

Abstract:This paper presents a miniature fiber-optic high-temperature pressure sensor fabricated on the tip of a singlemode (SM) fiber by means of fusion splicing, cleaving, and wet chemical etching. A new approach was developed to simplify the fabrication and greatly improve the sensitivity. The sensor is made entirely of fused silica, whose high-temperature sensing capability is explored in detail for the first time. Two sensors were tested up to 611 $^{\circ}\hbox{C}$ and 710 $^{\circ}\hbox{C}$, respectively, showing excellent repeatability better than 0.62% and 1.4%. The maximum operating temperature is limited by the mechanical creep of the fused silica diaphragm.

engineering, electrical & electronic,optics,telecommunications
High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment

Fei Feng,Pinggang Jia,Jiang Qian,Zhengpeng Hu,Guowen An,Li Qin

DOI: https://doi.org/10.3390/mi12060623

IF: 3.4

2021-05-28

Micromachines

Abstract:This paper proposes a high-temperature optical fiber Fabry–Perot pressure sensor based on the micro-electro-mechanical system (MEMS). The sensing structure of the sensor is composed of Pyrex glass wafer and silicon wafer manufactured by mass micromachining through anodic bonding process. The separated sensing head and the gold-plated fiber are welded together by a carbon dioxide laser to form a fiber-optic Fabry–Perot high temperature pressure sensor, which uses a four-layer bonding technology to improve the sealing performance of the Fabry–Perot cavity. The test system of high temperature pressure sensor is set up, and the experimental data obtained are calculated and analyzed. The experimental results showed that the maximum linearity of the optical fiber pressure sensor was 1% in the temperature range of 20–400 °C. The pressure sensor exhibited a high linear sensitivity of about 1.38 nm/KPa at room temperature at a range of pressures from approximarely 0-to 1 MPa. The structure of the sensor is characterized by high consistency, which makes the structure more compact and the manufacturing process more controllable.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
Multimode fiber tip Fabry-Perot cavity for highly sensitive pressure measurement

W. P. Chen,D. N. Wang,Ben Xu,C. L. Zhao,H. F. Chen

DOI: https://doi.org/10.1038/s41598-017-00300-x

IF: 4.6

2017-01-01

Scientific Reports

Abstract:We demonstrate an optical Fabry-Perot interferometer fiber tip sensor based on an etched end of multimode fiber filled with ultraviolet adhesive. The fiber device is miniature (with diameter of less than 60 μm), robust and low cost, in a convenient reflection mode of operation, and has a very high gas pressure sensitivity of −40.94 nm/MPa, a large temperature sensitivity of 213 pm/°C within the range from 55 to 85 °C, and a relatively low temperature cross-sensitivity of 5.2 kPa/°C. This device has a high potential in monitoring environment of high pressure.
A Large-Range and High-Sensitivity Fiber-Optic Fabry–Perot Pressure Sensor Based on a Membrane-Hole-Base Structure

Bowen Duan,Zhenyin Hai,Maocheng Guo,Yongqiu Zheng,Jiamin Chen,Jiandong Bai,Zhixuan Su,Rui Liang,Hongtian Zhu,Qi Zhang,Chenyang Xue

DOI: https://doi.org/10.3390/mi15020174

IF: 3.4

2024-01-24

Micromachines

Abstract:In the field of in situ measurement of high-temperature pressure, fiber-optic Fabry–Perot pressure sensors have been extensively studied and applied in recent years thanks to their compact size and excellent anti-interference and anti-shock capabilities. However, such sensors have high technological difficulty, limited pressure measurement range, and low sensitivity. This paper proposes a fiber-optic Fabry–Perot pressure sensor based on a membrane-hole-base structure. The sensitive core was fabricated by laser cutting technology and direct bonding technology of three-layer sapphire and develops a supporting large-cavity-length demodulation algorithm for the sensor's Fabry–Perot cavity. The sensor exhibits enhanced sensitivity, a simplified structure, convenient preparation procedures, as well as improved pressure resistance and anti-harsh environment capabilities, and has large-range pressure sensing capability of 0–10 MPa in the temperature range of 20–370 °C. The sensor sensitivity is 918.9 nm/MPa, the temperature coefficient is 0.0695 nm/(MPa∙°C), and the error over the full temperature range is better than 2.312%.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
High temperature and high pressure fiber microsphere Fabry–Perot sensor based on Vernier effect and FBG

Zhengqiang Yan,Shanshan Zhu,Yanjun Zhang,Pinggang Jia,Jia Liu,Lei Liu,Fengtong Zhu,Huiqing Niu,Guoweng An

DOI: https://doi.org/10.1109/jsen.2023.3258959

IF: 4.3

2023-01-01

IEEE Sensors Journal

Abstract:A pressure and temperature sensor based on dual Fabry–Perot interferometers (F-PIs) using Vernier effect and fiber Bragg grating (FBG) in a hollow silica microsphere-cavity (HSMC) structure is demonstrated theoretically and experimentally. The sensor consists of an F-P cavity formed by inserting the FBG into the HSMC and a reference F-P cavity. Two structures are connected by a 50% coupler to generate the Vernier effect. The change of external pressure will change the length of the microsphere F-P cavity. Utilizing the characteristics that FBG is temperature-sensitive and not effected by pressure, the simultaneous detection of temperature and pressure can be realized by demodulating equation. With a pressure sensitivity of 49.5 nm/MPa and a temperature sensitivity of 14.3 pm/°C, the sensor achieves pressure detection at 300 °C ranging from 0 to 0.8 MPa. The sensor has the characteristics of temperature compensation, high production efficiency, low cost, strong robustness, self-encapsulation, and so on. It has a broad prospect in the field of high-temperature and high-pressure detection.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
All-SiC Fiber-Optic Sensor Based on Direct Wafer Bonding for High Temperature Pressure Sensing

Ting Liang,Wangwang Li,Cheng Lei,Yongwei Li,Zhiqiang Li,Jijun Xiong

DOI: https://doi.org/10.1007/s13320-021-0640-7

IF: 2.814

2021-10-02

Photonic Sensors

Abstract:Abstract This paper presents an all-SiC fiber-optic Fabry-Perot (FP) pressure sensor based on the hydrophilic direct bonding technology for the applications in the harsh environment. The operating principle, fabrication, interface characteristics, and pressure response test of the proposed all-SiC pressure sensor are discussed. The FP cavity is formed by hermetically direct bonding of two-layer SiC wafers, including a thinned SiC diaphragm and a SiC wafer with an etched cavity. White light interference is used for the detection and demodulation of the sensor pressure signals. Experimental results demonstrate the sensing capabilities for the pressure range up to 800 kPa. The all-SiC structure without any intermediate layer can avoid the sensor failure caused by the thermal expansion coefficient mismatch and therefore has a great potential for pressure measurement in high temperature environments.

optics,instruments & instrumentation
Comparison of Measurements with Finite-Element Analysis of Silicon-Diaphragm-Based Fiber-Optic Fabry–Perot Temperature Sensors

Rongkun Wang,Xuejian Xie,Xiangang Xu,Xiufang Chen,Longfei Xiao

DOI: https://doi.org/10.3390/s19214780

IF: 3.9

2019-11-03

Sensors

Abstract:Silicon-diaphragm-based fiber-optic Fabry–Perot sensors with different intracavity pressures were fabricated by anodic bonding and microelectromechanical techniques. The thermal stress and thermal expansion of the Fabry–Perot (FP) sensor caused by high-temperature bonding and temperature change were simulated by finite-element analysis. The calculated thermal stress is largest in the center and edge regions of the resonance cavity, reaching from 2 to 6 MPa. The reflection spectra and temperature sensitivity of the sensors were simulated by using a two-dimensional wave-optic model in Comsol. Theoretical calculations were also made for the FP cavity without considering silicon-diaphragm deformation and thermal stress. Four sensors with intracavity pressures of 0.01, 0.03, 0.04, and 0.05 MPa were tested at low temperatures, showing a high degree of consistency with the simulation results rather than theoretical calculation, especially for high intracavity pressure. This method is expected to aid the analysis of thermal stress generated during the bonding process and to facilitate better design and control of the temperature sensitivity of the sensor.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
A High Sensitivity Temperature Sensor Based on Balloon-Shaped Bent SMF Structure with Its Original Polymer Coating

Ke Tian,Gerald Farrell,Elfed Lewis,Xianfan Wang,Haidong Liang,Pengfei Wang

DOI: https://doi.org/10.1088/1361-6501/aac992

IF: 2.398

2018-01-01

Measurement Science and Technology

Abstract:A high sensitivity optical fibre temperature sensor is demonstrated based on a balloon-shaped bent single-mode (BSBS) fibre structure where the fibre retains its original protective polymer coating. The BSBS fibre structure can be simply realized by bending a coated straight single-mode fibre into the balloon shape using a section of silica capillary tube. By adjusting the bending radius of the balloon-shaped fibre section, a modal interferometer between the core mode and the coating mode can be effectively implemented at a suitable bending radius. Considering the intrinsically high thermo-optical coefficient and thermal expansion coefficient of the polymer coating, the BSBS fibre structure offers excellent temperature sensing performance. Experimental results show that the temperature sensitivity is as high as -2465 pm degrees C-1 with a resolution of 0.008 degrees C over the temperature range of 20.7 degrees C-31.7 degrees C. Based on its simple fabrication process, very low cost, and experimentally determined high sensitivity coupled with good repeatability, the temperature sensor described in this article could be a competitive candidate in many temperature sensing applications.
High sensitivity gas pressure and temperature optical sensors based on tapered no-core fiber coated with polydimethylsiloxane (PDMS)

Fan Li Xiang Su Huilin Mo Yilin Chen Jianheng Cao Changli Dong Changning Liu College of Physics and Electronic Science,Hubei Key Laboratory of Photoelectric Materials and Devices,Hubei Engineering Research Center for Micro-Nano Optoelectronic Devices and Integration,Hubei Normal University,Huangshi,Hubei,China

DOI: https://doi.org/10.1080/10739149.2024.2406922

2024-09-25

Instrumentation Science & Technology

Abstract:This article introduces a novel high-sensitivity pressure and temperature sensor utilizing a tapered no-core fiber (NCF) structure created by splicing the NCF with a single-mode fiber (SMF) to form a "SMF-NCF-SMF" structure, tapering the NCF, and applying a polydimethylsiloxane (PDMS) film on the tapered NCF surface. The experimental results show that the device with a diameter of 10 μm has a pressure sensitivity of 86.63 nm/MPa within one to two atmospheres. Furthermore, the temperature sensitivity is −1.97 nm/°C from 30 °C to 60 °C. The sensor exhibits excellent stability and repeatability, and the PDMS film enhances the mechanical strength of the device, indicating promising potential for high-sensitivity pressure and temperature applications.

chemistry, analytical,instruments & instrumentation
Miniature High-Frequency Response, High- Pressure -Range Dynamic Pressure Sensor Based on All-Silica Optical Fiber Fabry-Perot Cavity

Chenglei Chu,Junjie Wang,Jinyao Qiu

DOI: https://doi.org/10.1109/jsen.2021.3068456

IF: 4.3

2021-06-15

IEEE Sensors Journal

Abstract:A miniature shock-wave pressure sensor based on an optical-fiber tip F-P cavity is described. The basic theory and fabrication process of this sensor are given. The transient interferometric phase of this F-P cavity under the action of a shock pressure wave is demodulated by using the passive homodyne demodulation technique. The static and dynamic calibration test are conducted using piston-type pressure calibration machine and air shock tube. The results indicate that the linearity, repeatability, and hysteresis of the sensor within the 1 MPa pressure range are 4.33%, 1.9%, and 2.8%, respectively, and that the resonant frequency is 8.97 MHz. Pressure sensors in the same package is used to measure the blast wave pressure from pre-charged pneumatic. The pressure probe of the ultra-fine package is used to accurately measure the shock wave pressure produced by the focused electromagnetic shock wave source. The results indicate that different pressure sensors with different diaphragm thickness and different packaging forms can measure shock waves with different ranges and rise times.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
A High-Sensitivity Fiber-optic Fabry-Perot Gas Pressure Sensor with Epoxy Resin Adhesive

Danping Xu,Haitao Gao,Zheyu Hou,Yanan Zhang,Xuanxiang Tong,Yizhuo Zhang,Pengyu Zhang,Jian Shen,Chaoyang Li

DOI: https://doi.org/10.1109/jsen.2022.3168290

IF: 4.3

2022-01-01

IEEE Sensors Journal

Abstract:A high-sensitivity fiber-optic gas pressure sensor based on a Fabry-Perot interferometer filled with epoxy resin adhesive is proposed. The factors of affecting the pressure sensitivity are theoretically analyzed and verified experimentally. In our experiment, the pressure sensitivity of the epoxy-filled sensor with the thinnest diaphragm thickness of $6.61~\mu \text{m}$ corresponding to the cavity length of $65.45~\mu \text{m}$ is −530.17 pm/kPa from 200 to 300 kPa. The sensitivity of the proposed pressure sensor with the shortest cavity length of $90.43~\mu \text{m}$ corresponding to the film thickness of $10.65~\mu \text{m}$ is −378.18 pm/kPa from 200 to 300 kPa. To further improve the sensitivity, the proposed pressure sensor is optimized, which consists of two cascaded Fabry-Perot interferometers separated by a long section of single-mode fiber to form Vernier effect. Such a pressure sensor based on the epoxy-filled Fabry-Perot interferometer and the Vernier effect obtains a high sensitivity of 2.526 nm/kPa in the local measurement range of 233 to 259 kPa and a low detection limit of 0.00892 kPa. With the advantages of high sensitivity, compact structure and simple fabrication, the proposed pressure sensor has potential applications in the biomedical field and ocean exploration.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
Hybrid Fiber Optic Sensor, Based on the Fabry–Perot Interference, Assisted with Fluorescent Material for the Simultaneous Measurement of Temperature and Pressure

Xiaofeng Jiang,Chun Lin,Yuanqing Huang,Kan Luo,Jianhuan Zhang,Qingshan Jiang,Chentao Zhang

DOI: https://doi.org/10.3390/s19051097

IF: 3.9

2019-03-04

Sensors

Abstract:Herein we design a fiber sensor able to simultaneously measure the temperature and the pressure under harsh conditions, such as strong electromagnetic interference and high pressure. It is built on the basis of the fiber-optic Fabry–Perot (F–P) interference and the temperature sensitive mechanism of fluorescent materials. Both halogen lamps and light-emitting diodes (LED) are employed as the excitation light source. The reflected light from the sensor contains the low coherent information of interference cavity and the fluorescent lifetime. This information is independent due to the separate optical path and the different demodulation device. It delivers the messages of pressure and temperature, respectively. It is demonstrated that the sensor achieved pressure measurement at the range of 120–400 KPa at room temperature with a sensitivity of 1.5 nm/KPa. Moreover, the linearity of pressure against the cavity length variation was over 99.9%. In the meantime, a temperature measurement in the range of 25–80 °C, with a sensitivity of 0.0048 ms/°C, was obtained. These experimental results evince that this kind of sensor has a simple configuration, low-cost, and easy fabrication. As such, it can be particularly applied to many fields.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Micro-bubble F-P cavity and FBG Cascade Structure-based Pressure Sensor with Temperature Self-compensation For Minimally Invasive Surgery

Tianliang Li,Yuheng Zheng,Jun Wang,Renzhong Liu,Yuegang Tan,Zude Zhou,Wenzhou Guo

DOI: https://doi.org/10.1109/tbme.2022.3166840

IF: 4.6

2022-01-01

IEEE Transactions on Biomedical Engineering

Abstract:This paper presents a high-sensitivity optical fiber pressure sensor with temperature self-compensation for pressure measurement in minimally invasive surgery through a cascade structure of Fabry-Perot (F-P) interferometer and fiber Bragg grating (FBG). A micro-bubble is configured at the tip of the fiber to form an F-P cavity that is sensitive to pressure. A loose optical fiber inscribed with an FBG element is cascaded with the F-P cavity leading to temperature compensation for the designed sensor. The sensing theoretical model has been derived and combined with the finite element method (FEM) simulation the sensor structure has been determined as well. Fabrication processing of the designed sensor has been optimized and explored by experiments. Calibration experiment results indicate that the pressure sensitivity of the designed sensor is 8.93 pm/kPa, which is consistent with the simulated value. The temperature coupled error is less than 3.89% leading to a capability for temperature self-compensation. Several heart-vascular simulation experiments have been carried out to investigate the dynamic performance of the designed sensor, which shows the measured pressure errors within this confidence interval of [-2.56%, 2.54%] correspond to high confidence of 0.95. An in-vivo intracranial pressure (ICP) measurement experiment on the rat brain has been conducted to further validate the feasibility and effectiveness of the designed sensor.

engineering, biomedical
A High-Sensitive Fiber-Optic Fabry-Perot Sensor With Parallel Polymer-Air Cavities Based on Vernier Effect for Simultaneous Measurement of Pressure and Temperature

Rui Pan,Wenlong Yang,Linjun Li,Yuqiang Yang,Lijie Zhang,Xiaoyang Yu,Jianying Fan,Shuang Yu,Yanling Xiong

DOI: https://doi.org/10.1109/jsen.2021.3101863

IF: 4.3

2021-10-01

IEEE Sensors Journal

Abstract:A novel high-sensitive fiber-optic Fabry-Perot sensor with parallel polymer-air cavities based on Vernier effect was proposed and demonstrated for simultaneous measurement of pressure and temperature. The sensor is composed of two parallel Fabry-Perot cavities both are fabricated by splicing a section of silica tube to the single-mode fiber. One cavity is filled with polydimethylsiloxane, and the other cavity is filled with a thin layer of ultraviolet glue at the end-face of silica tube, ensuring that the free spectrum ranges of two Fabry-Perot cavities are similar and generate the Vernier effect. The Fabry-Perot interferometer filled with polydimethylsiloxane was found to be sensitive to pressure as well as temperature, whereas the Fabry-Perot interferometer filled with a thin layer of ultraviolet glue was sensitive to pressure only. Owing to the different features of two Fabry-Perot interferometers, the sensor achieved simultaneous measurement of pressure and temperature. Combined with Vernier effect, the sensor provided a pressure sensitivity of −36.93 nm/MPa and a temperature sensitivity of 10.29 nm/°C, respectively. The sensor has exhibited potential applications in fields of medical diagnostics, environmental monitoring, and biological sensing.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
Temperature-Compensated Interferometric High-Temperature Pressure Sensor Using a Pure Silica Microstructured Optical Fiber

Mohammad Istiaque Reja,Linh V. Nguyen,Lu Peng,Heike Ebendorff-Heidepriem,Stephen C. Warren-Smith

DOI: https://doi.org/10.1109/tim.2022.3157403

IF: 5.6

2022-01-01

IEEE Transactions on Instrumentation and Measurement

Abstract:We present a high-temperature interferometric pressure sensor using a simple-design and easy-to-fabricate pure silica four-hole novel microstructured optical fiber. The asymmetric geometry of the fiber allows hydrostatic pressure to induce stress at the optical fiber core, which converts to an interferometric shift. The large core of the fiber supports the propagation of several modes. Multimode interference created between different pairs of modes is used to sense the temperature and pressure change. The use of pure silica fiber is motivated by the ability of this fiber to operate up to high temperature as dopant diffusion is avoided. The sensor is demonstrated to measure pressure at a temperature up to 800 °C. We demonstrate temperature compensation using a Fourier approach to monitor different interference pairs and their phase response to pressure and temperature change. Experimental results show that the sensor has a linear response and excellent stability with a detection limit of 8.86 kPa at 800 °C temperature. This simple, compact, and potentially low-cost sensor is promising for harsh environment applications to improve quality control, operation efficiency, and safe working conditions.

engineering, electrical & electronic,instruments & instrumentation
Multimode fiber Fabry-Perot interferometer tip sensor

W. P. Chen,D. N. Wang,Ben Xu,Chunliu Zhao,H. F. Chen

DOI: https://doi.org/10.1109/ICOCN.2016.7875674

2016-01-01

Abstract:We demonstrate an optical Fabry-Perot interferometer fiber tip sensor based on an etched end of multimode fiber filled with ultraviolet adhesive. The fiber device is miniature and robust, in a convenient reflection mode of operation, has a high temperature sensitivity of 213 pm/°C within the range from 55 to 85°C, a good refractive index sensitivity of ∼−73.54 nm/RIU (refractive index unit) within the range from 1.332 to 1.372, and a high gas pressure sensitivity of −40.94nm/MPa. This device has a high potential in monitoring extreme environment of high temperature and pressure when Sapphire fiber and stable high temperature glue are employed.
Compact highly sensitive Fabry-Perot temperature and gas pressure sensing probe fabricated by a femtosecond laser and PDMS

Xiping Zhu,Chao Jiang,Huiling Huang,Tingshui Cao,Simei Sun

DOI: https://doi.org/10.1364/OL.489771

2023-06-01

Abstract:A high sensitivity optical fiber temperature and gas pressure sensor with integrated micro-cavity is proposed. First, a single-mode optical fiber (SMF) is spliced with a section of capillary, and then the sensitive material polydimethylsiloxane (PDMS) is filled into the capillary to form a Fabry-Perot interferometer (FPI). Finally, a femtosecond laser is used to ablate the fiber core of the SMF to form the third reflecting surface, constituting two cascaded FPIs. When two FPIs have a similar free spectral range, a Vernier effect is produced. The temperature and gas pressure sensitivity of the sensor reached 14.41 nm/°C and 113.82 nm/MPa, respectively, after using the sensitive material and Vernier effect double sensitization technology. In addition, a fiber Bragg grating is cascaded with the sensor, which can realize the simultaneous measurement of temperature and gas pressure and eliminate cross-sensitivity.
Pressure sensor catheter based on Fiber Tip Fabry-Pérot-Interferometer and Fiber Bragg Grating for temperature compensation

Marvin Friedemann,Sebastian Voigt,Jan Mehner

DOI: https://doi.org/10.1515/cdbme-2022-1103

2022-09-03

Current Directions in Biomedical Engineering

Abstract:This paper introduces a pressure sensor catheter with two different measurement principles. A Fabry-Perot- Interferometer at the fiber tip is formed by a reflective multilayer membrane of a pressure sensor chip. The cavity provides absolute pressure sensing. 20 millimeter before the fiber tip a Fiber Bragg Grating is integrated for additional temperature sensing. The sensing components are completely coated with a silicone mantle of 2 mm diameter. The signal evaluation is both done with a Fiber Bragg Grating interrogation device. First, mechanical structure aspects of the manufactured fiber-optic hybrid sensor as well as the sensing principle is described. Then, experimental results, including quantification and separation of pressure and temperature sensitivity are presented. Out of these characteristics the possibility for absolute pressure sensing with temperature compensation for the application as a pressure sensor catheter is confirmed.

The effects of corticosteroids on immunoregulation in sarcoidosis.

Single Optical Microfiber Enabled Tactile Sensor for Simultaneous Temperature and Pressure Measurement

A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application

High-temperature fiber-tip pressure sensor

High-Consistency Optical Fiber Fabry–Perot Pressure Sensor Based on Silicon MEMS Technology for High Temperature Environment

Multimode fiber tip Fabry-Perot cavity for highly sensitive pressure measurement

A Large-Range and High-Sensitivity Fiber-Optic Fabry–Perot Pressure Sensor Based on a Membrane-Hole-Base Structure

High temperature and high pressure fiber microsphere Fabry–Perot sensor based on Vernier effect and FBG

All-SiC Fiber-Optic Sensor Based on Direct Wafer Bonding for High Temperature Pressure Sensing

Comparison of Measurements with Finite-Element Analysis of Silicon-Diaphragm-Based Fiber-Optic Fabry–Perot Temperature Sensors

A High Sensitivity Temperature Sensor Based on Balloon-Shaped Bent SMF Structure with Its Original Polymer Coating

High sensitivity gas pressure and temperature optical sensors based on tapered no-core fiber coated with polydimethylsiloxane (PDMS)

Miniature High-Frequency Response, High- Pressure -Range Dynamic Pressure Sensor Based on All-Silica Optical Fiber Fabry-Perot Cavity

A High-Sensitivity Fiber-optic Fabry-Perot Gas Pressure Sensor with Epoxy Resin Adhesive

Hybrid Fiber Optic Sensor, Based on the Fabry–Perot Interference, Assisted with Fluorescent Material for the Simultaneous Measurement of Temperature and Pressure

Micro-bubble F-P cavity and FBG Cascade Structure-based Pressure Sensor with Temperature Self-compensation For Minimally Invasive Surgery

A High-Sensitive Fiber-Optic Fabry-Perot Sensor With Parallel Polymer-Air Cavities Based on Vernier Effect for Simultaneous Measurement of Pressure and Temperature

Temperature-Compensated Interferometric High-Temperature Pressure Sensor Using a Pure Silica Microstructured Optical Fiber

Multimode fiber Fabry-Perot interferometer tip sensor

Compact highly sensitive Fabry-Perot temperature and gas pressure sensing probe fabricated by a femtosecond laser and PDMS

Pressure sensor catheter based on Fiber Tip Fabry-Pérot-Interferometer and Fiber Bragg Grating for temperature compensation