Abstract:A cantilever enhanced fiber-optic photoacoustic microprobe with the cavity volume of only 119 μL is designed to detect SO 2 , which has the obvious advantages of passive sensing, anti-electromagnetic interference and low cost. A UV multi-mode fiber and a single-mode fiber are applied to transmit excitation light emitted by UV-LED and probe light, respectively. The lens assembly based on a collimating lens and a focusing lens is added to improve the light energy of UV-LED coupling into UV-fiber. Based on theoretical analysis and finite element method, a photoacoustic cavity with a radius of 1.5 mm and a length of 15 mm is designed, which is conducive to the realization of photoacoustic enhancement and rapid response at high frequencies. SO 2 gas diffuses into the PA cavity through a hole with the diameter of 0.5 mm and a gap of the cantilever with the width of 0.5 μm. A fiber-optic cantilever based on F-P interference is adopted to detect sound pressure. The frequency characteristic and response time of the sensor in different backgrounds of SF 6 and N 2 are analyzed experimentally. Compared with N 2 , the photoacoustic microprobe operates in SF 6 background with lower resonance frequency and longer response time, which is due to the high density and low thermal diffusivity of SF 6 gas. With the flow rate of 250 SCCM in the external cavity, the response time of the photoacoustic microprobe to SO 2 /SF 6 and SO 2 /N 2 are 96 s and 40 s, respectively. The detection limits of SO 2 in SF 6 and N 2 background are 35 ppb and 5 ppb, respectively.

ppb-Level SO2 Photoacoustic Sensors with a Suppressed Absorption-Desorption Effect by Using a 7.41 μm External-Cavity Quantum Cascade Laser

ppb-Level SO2 Photoacoustic Sensor for SF6 Decomposition Analysis Utilizing a High-Power UV Laser with a Power Normalization Method

Trace Photoacoustic SO2 Gas Sensor in SF6 Utilizing a 266 Nm UV Laser and an Acousto-Optic Power Stabilizer.

Highly Sensitive SO_2 Photoacoustic Sensor for SF_6 Decomposition Detection Using a Compact Mw-Level Diode-Pumped Solid-State Laser Emitting at 303 Nm

Quantum Cascade Laser Absorption Sensor for In-Situ, Real-Time and Sensitive Measurement of High-Temperature SO2 and SO3

Ppb-level Nitric Oxide Photoacoustic Sensor Based on a Mid-Ir Quantum Cascade Laser Operating at 52 °C

Highly sensitive photoacoustic multicomponent gas sensor for SF6 decomposition online monitoring

Ppb-Level H2s Detection for Sf6 Decomposition Based on A Fiber-Amplified Telecommunication Diode Laser and A Background-Gas-Induced High-Q Photoacoustic Cell

A Sensitive Carbon Dioxide Sensor Based on Photoacoustic Spectroscopy with a Fixed Wavelength Quantum Cascade Laser

EC-QCL-based Photoacoustic Spectroscopy for Simultaneous Detection of SF6 and SO2F2

Enhanced Near-Infrared QEPAS Sensor for Sub-Ppm Level H2S Detection by Means of a Fiber Amplified 1582 Nm DFB Laser

Ppbv-Level Ethane Detection Using Quartz-Enhanced Photoacoustic Spectroscopy with a Continuous-Wave, Room Temperature Interband Cascade Laser.

H2S Quartz-Enhanced Photoacoustic Spectroscopy Sensor Employing a Liquid-Nitrogen-cooled THz Quantum Cascade Laser Operating in Pulsed Mode

Near-infrared laser photoacoustic gas sensor for simultaneous detection of CO and H2S

Sub-ppb-level CH4 Detection by Exploiting a Low-Noise Differential Photoacoustic Resonator with a Room-Temperature Interband Cascade Laser.

External Cavity Quantum Cascade Laser-Based QEPAS for Chlorodifluoromethane Spectroscopy and Sensing

Mid-infrared swept cavity-enhanced photoacoustic spectroscopy using a quartz tuning fork

EC-QCL Based Photoacoustic Spectroscopy for Detection of SF6 Decomposition Components

Hydrogen peroxide detection with quartz-enhanced photoacoustic spectroscopy using a distributed-feedback quantum cascade laser

Cantilever enhanced fiber-optic photoacoustic microprobe for diffusion detection of sulfur dioxide

Detection of Trace Sulfur Dioxide Gas Using Quartz-Enhanced Photoacoustic Spectroscopy