Study on the configuration and applications of high spectral resolution Raman spectrometer

Zhao-Jun Liu, Cun-Hua Zhao, Li-Gang Han, Yu-Jun Mo
2010-02-01
Abstract:In the present paper the authors studied theoretically and experimentally the relationship between spectral resolution and grating density, the limitations to improve the spectral resolution by using high density grating, the use of longer focal length grating to increase spectral resolution without compromising instrument throughput and the effect of slit width on spectral resolution and sensitivity. Finally, two experiment results were provided to show why higher spectral resolution is important to ensure that critical information is not lost during a Raman measurement. Stressed silicon was produced by growing a thin crystalline layer of Si on an Si x Ge1-x substrate. It is possible to use Raman spectroscopy to probe the stress in the Si x Ge1-x and Si layers at the same time. The parameter to monitor the stress is the position of the Si-Si vibrational mode in Si x Ge1-x and Si. Such a measurement requires high spectral …
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