Crystal Structure Modification and Dielectric Properties of Sr- and La-Containing A 2 B 2 O 7 Thin Films for High-Temperature Operational Film Capacitors

Takahiro Nagata,Toyohiro Chikyow,Akira Ando
DOI: https://doi.org/10.1021/acsomega.4c00788
IF: 4.1
2024-06-25
ACS Omega
Abstract:In order to obtain thermally stable thin-film materials with high dielectric constant, A(2)B(2)O(7) thin films (Sr(2)Ta(2)O(7), Sr(2)Nb(2)O(7), La(2)Zr(2)O(7), and La(2)Ti(2)O(7)) containing Sr or La and their solid solutions were grown on Pt/Ti/SiO(2)/Si substrates by RF sputtering and their crystal structures and dielectric properties were investigated. The Sr(2)Ta(2)O(7) and La(2)Ti(2)O(7) films exhibit highly oriented crystal structures. By contrast, the Sr(2)Nb(2)O(7) and La(2)Zr(2)O(7)...
chemistry, multidisciplinary
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