Abstract:Lithium niobate (LN) is used in diverse applications such as spectroscopy, remote sensing, and quantum communications. The emergence of lithium-niobate-on-insulator (LNOI) technology and its commercial accessibility represent significant milestones. This technology aids in harnessing the full potential of LN's properties, such as achieving tight mode confinement and strong overlap with applied electric fields, which has enabled LNOI-based electro-optic modulators to have ultra-broad bandwidths with low-voltage operation and low power consumption. Consequently, LNOI devices are emerging as competitive contenders in the integrated photonics landscape. However, the nanofabrication, particularly LN etching, presents a notable challenge. LN is hard, dense, and chemically inert. It has anisotropic etch behavior and a propensity to produce material redeposition during the reactive-ion plasma etch process. These factors make fabricating low-loss LNOI waveguides (WGs) challenging. Recognizing the pivotal role of addressing these fabrication challenges for obtaining low-loss WGs, our research focuses on a systematic study of various process steps in fabricating LNOI WGs and other photonic structures. In particular, our study involves (i) careful selection of hard mask materials, (ii) optimization of inductively coupled plasma etch parameters, and finally, (iii) determining the optimal post-etch cleaning approach to remove redeposited material on the sidewalls of the etched photonic structures. Using the recipe established, we realized optical WGs with total (propagation and coupling) loss value of -10.5 dB, comparable to established values found in the literature. Our findings broaden our understanding of optimizing fabrication processes for low-loss lithium-niobate waveguides and can serve as an accessible resource in advancing LNOI technology.

Fabrication and surface treatment of electron-beam evaporated niobium for low-loss coplanar waveguide resonators

The effect of niobium thin film structure on losses in superconducting circuits

Loss mechanisms in superconducting thin film microwave resonators

Fabrication of low-loss lithium niobate on insulator waveguides on the wafer scale

Magnetic field resilient high kinetic inductance superconducting niobium nitride coplanar waveguide resonators

Nitrogen Plasma Passivated Niobium Resonators for Superconducting Quantum Circuits

Low Loss Superconducting Titanium Nitride Coplanar Waveguide Resonators

Long Low-Loss-Litium Niobate on Insulator Waveguides with Sub-Nanometer Surface Roughness

Low loss titanium dioxide strip loaded waveguide on thin-film lithium niobate at 1550nm

Low-loss Lithium Niobate on Insulator (LNOI) Waveguides of a 10 cm-length and a Sub-nanometer Surface Roughness

Enhanced radio-frequency performance of niobium films on copper substrates deposited by high power impulse magnetron sputtering

Thermal Nanoimprint Fabrication Of Chalcogenide Glass Waveguide Resonators

Low-loss waveguides on Y-cut thin film lithium niobate: towards acousto-optic applications

Low-loss α-tantalum coplanar waveguide resonators on silicon wafers: fabrication, characterization and surface modification

Optimization of waveguide fabrication processes in lithium-niobate-on-insulator platform

Muon spin rotation studies of niobium for superconducting rf applications

Nitrogen and argon doping of niobium for superconducting radio frequency cavities: a pathway to highly efficient accelerating structures

Characterizing Niobium Nitride Superconducting Microwave Coplanar Waveguide Resonator Array for Circuit Quantum Electrodynamics in Extreme Conditions

RF surface resistance tuning of superconducting niobium via thermal diffusion of native oxide

Flux Expulsion and Material Properties of Niobium Explored in 644-650 MHz Cavities

A thermostable trilayer resist for niobium lift-off