Direct Epitaxial Approach to Achieve a Monolithic On-Chip Integration of a HEMT and a Single Micro-LED with a High-Modulation Bandwidth

Yuefei Cai,Jack I. H. Haggar,Chenqi Zhu,Peng Feng,Jie Bai,Tao Wang
DOI: https://doi.org/10.1021/acsaelm.0c00985
IF: 4.494
2021-01-14
ACS Applied Electronic Materials
Abstract:Visible light communications (VLC) require III-nitride visible micro-light-emitting diodes (μLEDs) with a high-modulation bandwidth. Such μLEDs need to be driven at a high injection current density on a kA/cm<sup>2</sup> scale, which is about 2 orders of magnitude higher than those for normal visible LED operation. μLEDs are traditionally fabricated by dry-etching techniques where dry-etching-induced damages are unavoidable, leading to both a substantial reduction in performance and a great challenge to viability at a high injection current density. Furthermore, conventional biasing (which is simply applied across a p-n junction) is good enough for normal LED operation but generates a great challenge for a single μLED, which needs to be modulated at a high injection current density and at a high frequency. In this work, we have proposed a concept for an epitaxial integration and then demonstrated a completely different method that allows us to achieve an epitaxial integration of a single μLED with a diameter of 20 μm and an AlGaN/GaN high-electron-mobility transistor (HEMT), where the emission from a single μLED is modulated by tuning the gate voltage of its HEMT. Furthermore, such a direct epitaxial approach has entirely eliminated any dry-etching-induced damages. As a result, we have demonstrated an epitaxial integration of monolithic on-chip μLED-HEMT with a record modulation bandwidth of 1.2 GHz on industry-compatible <i>c</i>-plane substrates.
materials science, multidisciplinary,engineering, electrical & electronic
What problem does this paper attempt to address?
This paper attempts to address the issue of limited modulation bandwidth of micro-light-emitting diodes (μLEDs) in visible light communication (VLC) technology. Specifically, traditional μLEDs exhibit significant performance degradation under high injection current density, and dry etching processes can cause device damage, affecting their performance and reliability. Additionally, traditional biasing methods face challenges at high frequencies and high injection current densities. To solve these problems, the authors propose a direct epitaxial growth method to achieve monolithic integration of a single μLED with a diameter of 20 μm and an AlGaN/GaN high electron mobility transistor (HEMT). This method completely eliminates the damage caused by dry etching and allows stable control of μLED emission by adjusting the gate voltage of the HEMT. Experimental results show that this monolithically integrated μLED-HEMT device achieves a record modulation bandwidth of 1.2 GHz on an industry-compatible c-plane substrate.