Stress, reflectance, and stability of Ru/Be multilayer coatings with Mo interlayers near the 11?nm wavelength

Ruslan Smertin,Nikolay Chkhalo,Sergey Garakhin,Vladimir Polkovnikov,Sergey Zuev
DOI: https://doi.org/10.1364/ol.528271
IF: 3.6
2024-06-26
Optics Letters
Abstract:Ruslan Smertin, Nikolai Chkhalo, Sergey Garakhin, Vladimir Polkovnikov, Sergey Zuev The stress, reflectance, and temporal stability of Ru/Be multilayer mirrors, both with and without Mo interlayers, were studied. A Ru/Be ... [Opt. Lett. 49, 3690-3692 (2024)]
optics
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