Low-Temperature Synthesis of Large-Scale Molybdenum Disulfide Thin Films Directly on a Plastic Substrate Using Plasma-Enhanced Chemical Vapor Deposition

Chisung Ahn,Jinhwan Lee,Hyeong-U Kim,Hunyoung Bark,Minhwan Jeon,Gyeong Hee Ryu,Zonghoon Lee,Geun Young Yeom,Kwangsu Kim,Jaehyuck Jung,Youngseok Kim,Changgu Lee,Taesung Kim
DOI: https://doi.org/10.1002/adma.201501678
2015-09-16
Abstract:By plasma-enhanced chemical vapor deposition, a molybdenum disulfide (MoS2 ) thin film is synthesized directly on a wafer-scale plastic substrate at below 300 °C. The carrier mobility of the films is 3.74 cm(2) V(-1) s(-1) . Also, humidity is successfully detected with MoS2 -based sensors fabricated on the flexible substrate, which reveals its potential for flexible sensing devices.
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