Abstract:The silicon nitride integration platform has been successful at realizing extremely low waveguide losses across the visible to infrared and components including high performance lasers, filters, resonators, stabilization cavities, and optical frequency combs. Yet, progress towards implementing low loss, low power modulators in the silicon nitride platform, while maintaining the planar, wafer-scale process compatibility has been limited. Here we report a significant advance in integration of a piezo-electric (PZT) actuated micro-ring modulation in a fully-planar, wafer-scale silicon nitride platform, that maintains low optical loss (0.03 dB/cm in a 625 um resonator) at 1550 nm, with an order of magnitude increase in bandwidth (DC to 20 MHz 3-dB) and order of magnitude lower power consumption of 20 nW improvement over prior PZT modulators. The modulator provides a >14 dB ER and 7.1 million Q over the entire 4 GHz tuning range, a tuning efficiency of 200 MHz/V, and delivers the linearity required for control applications with 65.1 dBHz2/3 and 73.8 dBHz2/3 IMD3 SFDR at 1 MHz and 10 MHz respectively. We demonstrate two control applications, laser stabilization in a PDH lock loop, reducing laser frequency noise by 40 dB, and as a laser carrier tracking filter. This PZT modulator design can be extended to the visible in the ultra-low loss silicon nitride platform with minor waveguide design changes. This integration of PZT modulation in the ultra-low loss silicon nitride waveguide platform enables modulator control functions in a wide range of visible to IR applications such as atomic and molecular transition locking for cooling, controllable optical frequency combs, low-power external cavity tunable lasers, atomic clocks, and tunable ultra-low linewidth lasers and ultra-low phase noise microwave synthesizers.

Molecular-absorption-induced thermal bistability in PECVD silicon nitride microring resonators

Molecular-absorption-induced thermal bistablity in PECVD silicon nitride microring resonators

Optical Bistability in a Silicon Nitride Microring Integrated with 2D PtSe2 [Invited]

Realizing topological edge states in a silicon nitride microring-based photonic integrated circuit.

Enhanced nonlinear thermo-optic effect in silicon microring resonators with p-i-p microheaters for nonreciprocal transmission

Temperature Characteristic of Ring Resonator in Polarization Maintaining Silica Optical Waveguide

Fast Thermo-Optical Modulators with Doped-Silicon Heaters Operating at 2 Μm.

FWM Dynamics under Dual-Pump Thermal Behavior in Silicon Microring Resonator

A study of thermally-induced optical bistability and the role of surface treatments in Si-based mid-infrared photonic crystal cavities

Mitigation of carrier induced optical bistability in silicon ring resonators

Nonlinear optical bistability in microring resonators for enhanced phase sensing

Silicon Micro-Cavities And Their System Applications

Systematic Investigation of Coupling-Modulated Microring Resonators Based on Interleaved P-N Junctions

High thermo-optic tunability in PECVD silicon-rich amorphous silicon carbide

Analytical study of optical bistability in silicon-waveguide resonators

High-speed silicon microring modulator at the 2 μm waveband with analysis and observation of optical bistability

Low Power and Large Modulation Depth Optical Bistability in an Si Photonic Crystal L3 Cavity

Thermal Oscillation in the Hybrid Si3N4 - TiO2 Microring

Efficient thermo-optic micro-ring phase shifter made of PECVD silicon-rich amorphous silicon carbide

Silicon nitride stress-optic microresonator modulator for optical control applications