Effects of orientation on microstructure and mechanical properties of TiN/AlN superlattice films

Yanmeng Chen,Tao Guo,Jiawei Wang,Xiaolu Pang,Lijie Qiao
DOI: https://doi.org/10.1016/j.scriptamat.2021.113951
IF: 6.302
2021-08-01
Scripta Materialia
Abstract:Superlattice structure can significantly improve the hardness of the films without damaging the toughness. However, in TiN/AlN superlattice structure, the thickness of metastable c-AlN has a certain limit, which limits the improvement of hardness. We adjusted the orientation of the entire superlattice films under the same deposition parameters and observed that AlN has a thicker coherent thickness in the <110>-oriented TiN/AlN superlattice film relative to the <100> orientation through HRTEM, and the superlattice film reached a higher hardness peak value (~38.6GPa) at the same time. This work provides a new implementation method to improve the mechanical properties of superlattice films.
materials science, multidisciplinary,nanoscience & nanotechnology,metallurgy & metallurgical engineering
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