Abstract:Next generation cosmic microwave background (CMB) polarimetry experiments aim to deploy order 500,000 detectors, requiring repeatable and reliable fabrication process with stable and uniform transition edge sensor (TES) bolometer performance. We present a hafnium (Hf)-based TES bolometer for CMB experiments. We employ a novel heated sputter deposition of the Hf films enabling us to finely tune the critical temperature (Tc) between 140 mK - 210 mK. We found elevated deposition temperatures result in films with lower stress, larger crystal sizes, and a smaller relative abundance of the m-plane to c-plane $\alpha$ phase, all contributing to the empirical linear dependence of critical temperature on deposition temperature. Crucially, the heated sputter deposition simultaneously ensures that the critical temperature does not drift despite exposure to heat throughout ongoing fab processes (sometimes reaching 350C) as long as the initial deposition temperature is not exceeded. Tcs lower than 170 mK require deposition temperature greater than 400C, far in excess of typical temperatures the wafer may experience. This ample thermal budget allows us to relax the stringent thermal management that conventional aluminum manganese (AlMn) TES bolometers require, for which temperatures as low as 200C - 250C are used to anneal the AlMn in an effort to adjust the Tc. Hf additionally exhibits an intrinsic steep superconducting transition (we measure $\alpha >$ 200) and a corresponding high loop gain (exceeding $\mathcal{L}>10$ deep in the transition). We precisely design the normal resistance of the TES to range between 10 milli-Ohm and 1 Ohm through an interdigitated geometry, making these TES bolometers compatible with both TDM, FDM, and $\mu$-mux readout systems. We report on bolometer parameters including critical temperature, normal resistance, saturation power, time constant, and loop gain.

Response of a Cold-Electron Bolometer in a coplanar antenna system

Measurements of dichroic bow-tie antenna arrays with integrated cold-electron bolometers using YBCO oscillators

Wide-Range Bolometer with RF Readout TES

Development of hafnium-based transition edge sensor bolometers for cosmic microwave background polarimetry experiments

The Performance of Suspended Superconducting NbN Hot Electron Bolometer with Buffer Layer

Heterodyne Mixing and Direct Detection Performance of a Superconducting NbN Hot-Electron Bolometer

Silicon-Based Antenna-Coupled Polarization-Sensitive Millimeter-Wave Bolometer Arrays for Cosmic Microwave Background Instruments

A Dual-polarized Broadband Planar Antenna and Channelizing Filter Bank for Millimeter Wavelengths

Optical Response of Strained- and Unstrained-Silicon Cold-Electron Bolometers

A strained silicon cold electron bolometer using Schottky contacts

Superconducting noise bolometer with microwave bias and readout for array applications

Performance of cryogenic microbolometers and calorimeters with on-chip coolers

Cryogenic sensor enabling broad-band and traceable power measurements

The Design of Nb5N6 micro-bolometer for 0.3 THz Detector

Nb5N6 bolometer operated at room temperature for detecting at 100 GHz

Bolometer operating at the threshold for circuit quantum electrodynamics

Superconducting hot-electron nanobolometer with microwave bias and readout

Operation of a Wideband Terahertz Superconducting Bolometer Responding to Quantum Cascade Laser Pulses

Performance Comparison of SOI-Based Temperature Sensors for Room-Temperature Terahertz Antenna-Coupled Bolometers: MOSFET, PN Junction Diode and Resistor

Fabrication and Characterization of Ultrathin PBCO/YBCO/PBCO Constrictions for Hot Electron Bolometer THz Mixing Application

Ultrasensitive hot-electron nanobolometers for terahertz astrophysics