Aluminum Josephson junction microstructure and electrical properties modification with thermal annealing

N. D. Korshakov,D. O. Moskalev,A. A. Soloviova,D. A. Moskaleva,E. S. Lotkov,A. R. Ibragimov,M. V. Androschuk,I. A. Ryzhikov,Y. V. Panfilov,I. A. Rodionov
2024-03-05
Abstract:Superconducting qubits based on Al/AlOx/Al Josephson junction are one of the most promising candidates for the physical implementation of universal quantum computers. Due to scalability and compatibility with the state-of-the-art nanoelectronic processes one can fabricate hundreds of qubits on a single silicon chip. However, decoherence in these systems caused by two-level-systems in amorphous dielectrics, including a tunneling barrier AlOx, is one of the major problems. We report on a Josephson junction thermal annealing process development to crystallize an amorphous barrier oxide (AlOx). The dependences of the thermal annealing parameters on the room temperature resistance are obtained. The developed method allows not only to increase the Josephson junction resistance by 175%, but also to decrease by 60% with precisions of 10% in Rn. Finally, theoretical assumptions about the structure modification in tunnel barrier are proposed. The suggested thermal annealing approach can be used to form a stable and reproducible tunneling barriers and scalable frequency trimming for a widely used fixed-frequency transmon qubits.
Quantum Physics,Applied Physics
What problem does this paper attempt to address?
The problem that this paper attempts to solve is the frequency collision problem encountered during the expansion of superconducting qubits and the decoherence problem in these systems. Specifically, the paper focuses on how to adjust and stabilize the tunneling resistance \(R_n\) of Josephson junctions (JJs) through thermal annealing treatment, thereby achieving fine - tuning of the frequencies of fixed - frequency transmon qubits, reducing the decoherence phenomenon caused by two - level systems (TLS), and improving the coherence and stability of superconducting quantum circuits. The paper mentions that the traditional manufacturing process can cause a 2% to 4% change in the resistance \(R_n\) of Josephson junctions, and this change will further affect the frequencies of qubits, causing frequency collisions and limiting the large - scale integration of qubits. Therefore, developing an effective method to precisely control \(R_n\) is crucial for improving the performance of superconducting quantum computers. To achieve this goal, the research team explored a thermal annealing method, which can adjust \(R_n\) by changing the structure of the Josephson junction tunneling barrier (such as the crystallization of amorphous aluminum oxide \(AlO_x\)). The experimental results show that by optimizing the annealing temperature and time, not only can \(R_n\) be increased up to 175%, but also \(R_n\) can be reduced by up to 60% with an accuracy of 10%. In addition, the paper also proposes a theoretical hypothesis regarding the modification of the tunneling barrier structure, explains how thermal annealing affects the electrical characteristics of Josephson junctions, and discusses the significance of these findings for the frequency tuning of superconducting qubits. This method not only provides new possibilities for controlling the frequencies of superconducting qubits but also provides an important technical basis for the design and manufacture of future quantum computers.