Abstract:Advances in micro- and nanofabrication technologies have enabled the development of novel micro- and nanomechanical resonators which have attracted significant attention due to their fascinating physical properties and growing potential applications. In this review, we have presented a brief overview of the resonance behavior and frequency tuning principles by varying either the mass or the stiffness of resonators. The progress in micro- and nanomechanical resonators using the tuning electrode, tuning fork, and suspended channel structures and made of graphene have been reviewed. We have also highlighted some major influencing factors such as large-amplitude effect, surface effect and fluid effect on the performances of resonators. More specifically, we have addressed the effects of axial stress/strain, residual surface stress and adsorption-induced surface stress on the sensing and detection applications and discussed the current challenges. We have significantly focused on the active and passive frequency tuning methods and techniques for micro- and nanomechanical resonator applications. On one hand, we have comprehensively evaluated the advantages and disadvantages of each strategy, including active methods such as electrothermal, electrostatic, piezoelectrical, dielectric, magnetomotive, photothermal, mode-coupling as well as tension-based tuning mechanisms, and passive techniques such as post-fabrication and post-packaging tuning processes. On the other hand, the tuning capability and challenges to integrate reliable and customizable frequency tuning methods have been addressed. We have additionally concluded with a discussion of important future directions for further tunable micro- and nanomechanical resonators.

Stress-Controlled Frequency Tuning and Parametric Amplification of the Vibrations of Coupled Nanomembranes

Tuning the Resonance Properties of 2D Carbon Nanotube Networks Towards a Mechanical Resonator

Nonlinear nano-electromechanical lattices for high-frequency, tunable stress propagation

Tunable Micro- and Nanomechanical Resonators

A frequency-tunable nanomembrane mechanical oscillator with embedded quantum dots

Parametric Excitation of a SiN Membrane Via Piezoelectricity

Extreme mechanical tunability in suspended MoS 2 resonator controlled by Joule heating

Realization of dynamically controlled resonator pairs in nanomechanical arrays

Active Frequency Tuning of the Cantilever Nanoresonator Utilizing a Phase Transformation of NiTi Thin Film

Active Tuning of Vibration for Periodic Piezoelectric Micro Systems: A Non-Local Mindlin Plate Finite Element Approach

Micromanipulation transfer of membrane resonators for circuit optomechanics

Interface Stress for Bidirectional Frequency Tuning of Prebuckled Vanadium Dioxide MEMS Resonators

Parametric amplification and self-oscillation in a nanotube mechanical resonator.

Tuning dissipation dilution in 2D material resonators by MEMS-induced tension

Nanomechanical spectroscopy of ultrathin silicon nitride suspended membranes

Frequency stabilization of self-sustained oscillations in a sideband-driven electromechanical resonator

Mechanical Spectroscopy of Parametric Amplification in a High-Q Membrane Microresonator

Imaging nanomechanical vibrations and manipulating parametric mode coupling via scanning microwave microscopy

A hybrid graphene-siliconnitride nanomembrane as a versatile and ultra-widely tunable mechanical device

Integrated tuning fork nanocavity optomechanical transducers with high $f_{M}Q_{M}$ product and stress-engineered frequency tuning

Tunable strong coupling of mechanical resonance between spatially separated FePS$_3$ nanodrums