Abstract:Hard X‐ray multibeam ptychography paves the path toward high‐resolution, non‐destructive 3D imaging of mm‐sized samples. The present study describes the achievement of imaging of 0.1mm+ samples using up to 12 parallel uniquely coded X‐ray beams with energies of up to 20 keV. Cutting‐edge laser technology enables 3D printing of a high aspect ratio lens array for hard X‐ray parallel focusing. Hard X‐rays are needed for non‐destructive nano‐imaging of solid matter. Synchrotron radiation facilities (SRF) provide the highest‐quality images with single‐digit nm resolution using advanced techniques such as X‐ray ptychography. However, the resolution or field of view is ultimately constrained by the available coherent flux. To address this, the beam's incoherent fraction can be exploited using multiple parallel beams in an X‐ray multibeam ptychography (MBP) approach. This expands the domain of X‐ray ptychography to larger samples or more rapid measurements. Both qualities favor the study of complex composite or functional samples, such as catalysts, energy materials, or electronic devices. The challenge of performing ptychography at high energy and with many parallel beams must be overcome to extract the full advantages for extended samples while minimizing beam attenuation. Here, that challenge is overcome by creating a lens array using cutting‐edge laser printing technology and applying it to perform scanning with MBP with up to 12 beams and at photon energies of 13 and 20 keV. This exceeds the measurement limits of conventional hard X‐ray ptychography without compromising image quality for various samples: Siemens star test pattern, Ni/Al2O3 catalyst, microchip, and gold nano‐crystal clusters.

Soft X-ray spectro-ptychography on boron nitride nanotubes, carbon nanotubes and permalloy nanorods

X-ray multibeam ptychography at up to 20 keV: nano-lithography enhances X-ray nano-imaging

Comparison of Soft X-ray Spectro-Ptychography and Scanning Transmission X-ray Microscopy

Fast X-ray ptychography: towards nanoscale imaging of large volume of brain

Electronvolt energy resolution with broadband ptychography

Hard X-ray grazing incidence ptychography: Large field-of-view nanostructure imaging with ultra-high surface sensitivity

Near-Edge X-Ray Absorption Fine Structure Spectroscopy As A Tool for Investigating Nanomaterials

Three-dimensional Hard X-ray Ptychographic Reflectometry Imaging on Extended Mesoscopic Surface Structures

X-Ray Phase Contrast and Fluorescence Nanotomography for Material Studies

Hard x-ray grazing-incidence ptychography: large field-of-view nanostructure imaging with ultra-high surface sensitivity

Lab-scale soft x-ray ptychography: advanced nanoscale imaging and beam diagnostics

First X‐ray spectral ptychography and resonant ptychographic computed tomography experiments at the SWING beamline from Synchrotron SOLEIL

Hard x-ray scanning microscopy with coherent radiation: Beyond the resolution of conventional x-ray microscopes

Atomically Resolved Imaging of Radiation-Sensitive Metal-Organic Frameworks Via Electron Ptychography

Electron Ptychographic Diffractive Imaging of Boron Atoms in LaB 6 Crystals

X‐Ray Multibeam Ptychography at up to 20 keV: Nano‐Lithography Enhances X‐Ray Nano‐Imaging

High-throughput Imaging and Spectroscopy of Individual Carbon Nanotubes in Devices with Light Microscopy

Solving complex nanostructures with ptychographic atomic electron tomography

Hyperspectral microscopy of boron nitride nanolayers using hybrid femto/picosecond coherent anti-Stokes Raman scattering

Hard X-ray Spectrographs with Resolution Beyond 100 micro-eV

Design and performance of a scanning ptychography microscope