Hard x-ray scanning microscopy with coherent radiation: Beyond the resolution of conventional x-ray microscopes

A. Schropp,R. Hoppe,J. Patommel,D. Samberg,F. Seiboth,S. Stephan,G. Wellenreuther,G. Falkenberg,C. G. Schroer
DOI: https://doi.org/10.1063/1.4729942
IF: 4
2012-06-18
Applied Physics Letters
Abstract:We demonstrate x-ray scanning coherent diffraction microscopy (ptychography) with 10 nm spatial resolution, clearly exceeding the resolution limits of conventional hard x-ray microscopy. The spatial resolution in a ptychogram is shown to depend on the shape (structure factor) of a feature and can vary for different features in the object. In addition, the resolution and contrast are shown to increase with increasing coherent fluence. For an optimal ptychographic x-ray microscope, this implies a source with highest possible brilliance and an x-ray optic with a large numerical aperture to generate the optimal probe beam.
physics, applied
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