Time-gated optical spectroscopy of field-effect-stimulated recombination via interfacial point defects in fully processed silicon carbide power MOSFETs
Maximilian W. Feil,Magdalena Weger,Hans Reisinger,Thomas Aichinger,André Kabakow,Dominic Waldhör,Andreas C. Jakowetz,Sven Prigann,Gregor Pobegen,Wolfgang Gustin,Michael Waltl,Michel Bockstedte,Tibor Grasser
DOI: https://doi.org/10.1103/physrevapplied.22.024075
IF: 4.6
2024-09-02
Physical Review Applied
Abstract:Fully processed SiC power MOSFETs emit light during switching of the gate terminal, while the drain and source terminals are both grounded. The emitted photons are caused by defect-assisted recombination of electrons and holes at the 4H - ([A-Z][a-z])([A-Z])/([A-Z][a-z])([A-Z])2 interface, and can be detected through the SiC substrate. Here we present time-gated spectroscopic characterization of these interfacial point defects. Unlike in previous studies, the devices were opened in such a way that the drain contact remained electrically active. A separate examination of the photons emitted at the rising and falling transitions of the gate-source voltage enabled the extraction of two different spectral components. One of these components consists of a single transition with phonon replicas of a local vibrational mode with an astonishingly high energy of 220 meV—well above the highest phonon modes in 4H -SiC and ([A-Z][a-z])([A-Z])2 of 120 and 137 meV, respectively. On the basis of a quantum mechanical model, we successfully fitted its emission spectrum and assigned it to donor-acceptor-pair recombination involving a carbon-cluster-like defect. Other transitions were assigned to EH6/7 -assisted, EK2 -D, and nitrogen-aluminum donor-acceptor-pair recombination. Because of the relevance of these defects in the operation of SiC MOSFETs, these insights will contribute to improved reliability and performance of these devices. https://doi.org/10.1103/PhysRevApplied.22.024075 © 2024 American Physical Society
physics, applied