Abstract:Recent trends of interferometric wavefront sensing tend to focus on high precision, anti-vibration, compact, along with much more involved of electric and computer technology. And the optical principles employed not only limit to interference but also include diffraction, scattering, polarization, etc. In this paper, some selected examples basing on the research works in our group will be given to illustrate the trends mentioned above. To achieve extra high accuracy, phase-shifting point diffraction interferometry (PS-PDI) is believed to be a good candidate as it employs a nearly perfect point diffraction spherical wavefront as the reference and also takes advantage of the high precision of phase-shifting algorithms. Cyclic radial shearing interferometry (C-RSI) successively demonstrate the anti-vibration characteristic and can diagnose transient wavefront with only one single shot by employing a three-mirror common-path configuration and a synchronizing system. In contrast sharply with those early interferometers, interferometers with very compact configuration are more suitable to develop portable wavefront sensing instruments. Cross-grating lateral shearing interferometer (CG-LSI) is a very compact interferometer that adopts a cross-grating of millimeters to produce lateral shearing of the diffraction wave of the test wavefront. Be aware that, computer technique has been used a lot in all of the above interferometers but the non-null annual sub-aperture stitching interferometer (NASSI) for general aspheric surface testing mostly relies on the computer model of the physical interferometer setup and iterative ray-tracing optimization. The principles of the above mentioned interferometric wavefront sensing methods would be given in detail.

High precision wavefront correction method in interferometer testing

Interferometry Measurement Of Parallel Optical Plate Wavefront

Misalignment Correction for Free-Form Surface in Non-Null Interferometric Testing

Common-path and compact wavefront diagnosis system based on cross grating lateral shearing interferometer.

Reverse Optimization Reconstruction of Aspheric Figure Error in a Non-Null Interferometer

The wavefront aberration analysis and testing accuracy evaluation for the large aberration aspheric system based on the best fit sphere - art. no. 68342V

The Wavefront Aberration Analysis and Testing Accuracy Evaluation for the Large Aberration Aspheric System Based on the Best Fit Sphere

Aberration Calibration in High-Na Spherical Surfaces Measurement on Point Diffraction Interferometry

Research of precision interference locating method for a partial null compensator at aspheric testing

Reverse Optimization Reconstruction Method in Non-Null Aspheric Interferometry

Fast measurement spherical surface and fast patching up aspherical surface

Digital testing of transmitted wavefront distortion for micro-optics

Non-null interferometric aspheric testing with partial null lens and reverse optimization

Practical and Accurate Method for Aspheric Misalignment Aberrations Calibration in Non-Null Interferometric Testing

Recent Developments of Interferometric Wavefront Sensing

Robust and Accurate Measurement of Optical Freeform Surfaces with Wavefront Deformation Correction.

High precision wavefront correction using an influence function optimization method based on a hybrid adaptive optics system.

Aspherical Surface Wavefront Testing Based on Multi-Directional Orthogonal Lateral Shearing Interferometry

A novel method for suppressing phase retrieval error caused by scanning based on amplitude correlative in-situ matching

A Simple High-Precision Wide-Spectrum Interferometric System.

Improvement of Closed-Loop Wavefront Correction Performance in an Adaptive Optics System