Abstract:Photonic integrated circuits are indispensible for data transmission within modern datacenters and pervade into multiple application spheres traditionally limited for bulk optics, such as LiDAR and biosensing. Of particular interest are ferroelectrics such as Lithium Niobate, which exhibit a large electro-optical Pockels effect enabling ultrafast and efficient modulation, but are difficult to process via dry etching . For this reason, etching tightly confining waveguides - routinely achieved in silicon or silicon nitride - has not been possible. Diamond-like carbon (DLC) was discovered in the 1950s and is a material that exhibits an amorphous phase, excellent hardness, and the ability to be deposited in nano-metric thin films. It has excellent thermal, mechanical, and electrical properties, making it an ideal protective coating. Here we demonstrate that DLC is also a superior material for the manufacturing of next-generation photonic integrated circuits based on ferroelectrics, specifically Lithium Niobate on insulator (LNOI). Using DLC as a hard mask, we demonstrate the fabrication of deeply etched, tightly confining, low loss photonic integrated circuits with losses as low as 5.6 dB/m. In contrast to widely employed ridge waveguides, this approach benefits from a more than 1 order of magnitude higher area integration density while maintaining efficient electro-optical modulation, low loss, and offering a route for efficient optical fiber interfaces. As a proof of concept, we demonstrate a frequency agile hybrid integrated III-V Lithium Niobate based laser with kHz linewidth and tuning rate of 0.7 Peta-Hertz per second with excellent linearity and CMOS-compatible driving voltage. Our approach can herald a new generation of tightly confining ferroelectric photonic integrated circuits.

Mitigating photorefractive effect in thin-filmlithium niobate microring resonators

Mitigating photorefractive effect in thin-film lithium niobate microring resonators

Strong Nonlinear Optics In On-Chip Coupled Lithium Niobate Microdisk Photonic Molecules

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Strong Nonlinear Optics In On-Chip Lithium Niobate Photonic Molecules Fabricated By Femtosecond Laser

Athermal lithium niobate microresonator

Stable tuning of photorefractive micro-cavities using an auxiliary laser

Electro-optically tunable microring resonators in lithium niobate

UV-enhanced photorefractive response rate in a thin-film lithium niobate microdisk

Tunable and stable micro-ring resonator based on thin-film lithium tantalate

High-efficiency electro-optic modulator on thin-film lithium niobate with high-permittivity cladding

Versatile Tunning of Compact Microring Waveguide Resonator Based on Lithium Niobate Thin Films

Reduced material loss caused by Electron Beam Lithography in thin-film lithium niobate through post-process annealing

Nonlinear wave mixing in lithium niobate thin film

Photorefractive and pyroelectric photonic memory and long-term stability in thin-film lithium niobate microresonators

Tightly confining lithium niobate photonic integrated circuits and lasers

Parasitic conduction loss of lithium niobate on insulator platform

High performance fully etched isotropic microring resonators in thin-film lithium niobate on insulator platform

Controlling Microring Resonator Extinction Ratio Via Metal‐Halide Perovskite Nonlinearity

Photorefraction-induced Bragg Scattering in Cryogenic Lithium Niobate Ring Resonators.