Moth-eye anti-reflection structures in silicon for Long Wave IR applications

Phillip Papatzacos,Payton Broaddus,Olav Solgaard,M. Nadeem Akram,Per Ohlckers
DOI: https://doi.org/10.1080/09500340.2024.2400197
IF: 1.3
2024-09-19
Journal of Modern Optics
Abstract:Novel moth-eye anti-reflection structures in Si for the 12–16 μm wavelength range have been manufactured and compared to simulations. These structures show a 5-percentage point increase in transmission compared to untreated wafers. Simulations show strong indications that these structures may be further refined for a 10-percentage point increase in transmission and application in the 8–12 μm LWIR wavelength region associated with thermal cameras. The structures are realized using a single oxide mask and an anisotropic-isotropic-anisotropic etching process. These structures are highly temperature resistant compared to traditional anti-reflection coatings, and therefore lend themselves well to, amongst other things, moderate temperature processes like SLID bonding, which is an attractive approach for hermetic sealing of microbolometer array-based thermal cameras.
optics
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