Far-field Compound Super-resolution Lens for direct laser writing of arbitrary nano patterns and beyond

B. Yan,L. Yue,J. N. Monks,X. Yang,D. Xiong,C. Jiang,Z. Wang

DOI: https://doi.org/10.1364/OL.380574

2019-10-08

Abstract:A low-cost compound super-resolution lens, consisting of a Plano-Convex lens and a Microsphere lens (PCM), was proposed and demonstrated for subwavelength direct laser scanning writing application. The PCM lens can achieve a far-field super-resolution of ~{\lambda}/3.5 in air (~6 um away from lens) which surpasses resolution limit of existing commercial objective lenses and is the first of its kind. Arbitrary nano-patterns can now be directly fabricated on various substrates in a simpleand low-cost manner using developed PCM lens. The lens can also be used for other applications including nano-imaging and sensing as well in a confocal configuration. This work may lead to the development of next-generation low-cost direct laser nanofabrication machine and superresolution imaging nanoscope.

Optics,Applied Physics

What problem does this paper attempt to address?

The problem that this paper attempts to solve is: how to overcome the optical diffraction limit and realize a low - cost, highly efficient and flexible sub - wavelength direct laser writing technology for arbitrary nanopatterns. Specifically, the paper proposes a far - field compound super - resolution lens (PCM lens), which is composed of a plano - convex lens and a micro - sphere lens, for direct laser writing of arbitrary nanopatterns.

### Main problems and solutions:

1. **The challenge of the optical diffraction limit**:
- The optical diffraction limit restricts the ability of traditional laser processing techniques to generate extremely small features.
- The paper breaks through this limit by designing a new compound super - resolution lens (PCM lens).

2. **Limitations of existing technologies**:
- Existing super - resolution nanomachining techniques such as near - field scanning optical microscopy (NSOM), scanning probe microscopy (SPM), etc., although they can achieve sub - wavelength machining, have problems such as low throughput and complex control systems, and are difficult to be applied on a large scale.
- Although the micro - sphere lens technology in the near - field mode can achieve high resolution, it needs to contact or be close to the sample surface, which is prone to cause friction and damage.

3. **Developing a low - cost and highly efficient far - field super - resolution lens**:
- The paper proposes a compound structure (PCM lens) based on a plano - convex lens and a micro - sphere lens, which can achieve super - resolution focusing under far - field conditions.
- This lens can achieve a far - field super - resolution of about λ/3.5 in air and can operate stably at different working distances, avoiding the problems brought by the contact mode.

4. **Expanding application fields**:
- In addition to direct laser writing of nanopatterns, this lens can also be applied to other super - resolution imaging and sensing fields, such as nano - imaging and sensing in a confocal configuration.

### Conclusion:
The paper shows that this new PCM lens can not only realize the machining of complex arbitrary patterns at the sub - wavelength scale, but also has the advantages of low cost, high efficiency and flexibility, meeting the needs of large - area nanomachining in industrial applications. In addition, this technology lays the foundation for the development of the next - generation low - cost direct - laser nanomanufacturing machines and super - resolution imaging nanomicroscopes.