The Ti-B-N system: nanocomposite nc-TiN/a-(TiB2, BN) and nano-multilayer nc-TiN/a-TiBN thin films

Y H Lu,K Chu,Y G Shen

Abstract:The nanostructures and mechanical properties of nanocomposite nc-TiN/a-(TiB2, BN) and nanostructured multilayers nc-TiN/a-TiBN were investigated using X-ray diffraction (XRD), high-resolution transmission electron microscopy (HRTEM), microindentation, and stress measurements. It was found that the monolayer Ti-B-N thin films consisted of nanometer-sized crystalline (nc-) Ti(N, B) embedded into amorphous (a-) (TiB2, BN) matrix. When B content was below approximately 16 at.%, two different-sized nanocrystallites with mean grain sizes of approximately 3 and 9 nm respectively were embedded in a-TiB2. With increasing B incorporation (> approximately 27 at.%), more uniform nanograins was embedded a-(TiB2, BN). Incorporation of B not only decreased the size of nanocrystallites, but also gave rise to twinning deformation in nanocrystallites. A maximum hardness of approximately 44 GPa was achieved at B content of 19 at.%. It was also found that the nanostructure and mechanical behaviors of nc-TiN/a-TiBN multilayers was dependent on the modulation length (bilayer thickness A). Decrease of Lambda made the preferred orientation of nc-TiN gradually transform from (200) to (111). A maximum hardness of approximately 30 GPa was achieved at Lambda = 1.8 nm. Deflection from this Lambda value decreased hardness. By contrast, the residual compressive stress value monotonically increased with decrease of A. The enhancement of the hardness was due to the coherent stresses and the structural barriers to dislocation motion in the interface.