Abstract:Many industrial and scientific applications, ranging from 3D imaging (such as LIDAR, surveillance, object tracking) to Time Correlated Single Photon Counting (TCSPC), require the ability to perform time-resolved detection of weak light signals, down to single-photon level. Single-Photon Avalanche Diodes are solid-state detectors capable of single-photon sensitivity in the visible and near-infrared wavelength regions and compatible with standard silicon processes. This demand driven the development of low cost, large size CMOS SPAD imagers. In this work we present the design and characterization of a time-gated 32x32 SPAD image sensor fabricated in a 0.16 μm BCD (Bipolar-CMOS-DMOS) technology. The sensor is based on an innovative 16x16 macropixel structure, each composed by four SPADs with independent sensing front-end and event counters, plus a shared Timeto- Digital Converter (TDC). This approach enables higher fill-factor (9.6% with a pixel pitch of 100 μm) by sharing the costly (in terms of area) TDC resource, as well as reduced power dissipation. The imager provides simultaneous photon-timing and photon-counting data and features a 12 bit, 75 ps bin width TDC, which can perform one conversion per each gate window, with up to 62 windows per data readout frame. Two main operation modes are available: a single-photon mode, where an arbitration circuit within the macropixel is used to share the TDC among the 4 SPADs, but with no loss of X-Y resolution (i.e. keeping information about the triggered SPAD); and a two-photon-coincidence mode, where the TDC performs a conversion only if two SPADs of the macropixel are triggered within a preset coincidence window. Lastly, the sensor features multiple readout modes, with varying amount of output data, in order to fit different end-user applications. The imager is capable of 100 kfps (frames per second) in full readout mode, and up to 400 kfps in a reduced data set mode.

A column-shared histogramming TDC with pixel-to-pixel coincidence detection and compact analog counters for Flash LiDAR sensor

Optimization of System Design and Calibration Algorithm for SPAD-Based LiDAR Imager

A 50-Ps Gated VCRO-Based TDC with Compact Phase Interpolators for Flash LiDAR

Area-Efficient Mixed-Signal Time-to-Digital Converter Integration for Time-Resolved Photon Counting

TDC-less Direct Time-of-Flight Imaging Using Spiking Neural Networks

Low-Power Tdc Scheme Using Dll-Based Gray Counter for Infrared Imagers

Time-gated SPAD camera with reconfigurable macropixels for LIDAR applications

First-Arrival Differential Counting for SPAD Array Design

A dToF Ranging Sensor with Accurate Photon Detector Measurements for LiDAR Applications

An Indirect Time-of-Flight SPAD Pixel With Dynamic Comparator Reuse for a Single-Slope ADC

Photonic serial implementation of a flash analog-to-digital converter.

A 32×32 Flash LiDAR SPAD Sensor with Up-to-1kfps Motional Target Detection by Threshold-adaptive 2D Dynamic Vision

A Time-to-Digital Converter for Low-Power Consumption Single Slope Analog-to-Digital Converters in a High-Speed CMOS Image Sensor

A 13-Bit, 12-ps Resolution Vernier Time-to-Digital Converter Based on Dual Delay-Rings for SPAD Image Sensor

High-Precision GRO-Based ROIC Adopting Sliding Scale Average Method for SPAD Array

Correlation-Assisted Pixel Array for Direct Time of Flight

On-Chip Compressive Sensing with a Single-Photon Avalanche Diode Array

An 8×1k SPAD detector with TDI in 0.13μm CMOS technology

Multi-laser Source Interference Suppression Using Time Coding Method for SPAD Based Flash DToF Systems

SPAD Sensors with $256\times 2$ Linear Array for Time Delay Integration Demonstration.

Adaptive SVM-based pixel accumulation technique for a SPAD-based lidar system