Hard and tough nitrogen doped tungsten coatings deposited by HIPAC: Microstructure and mechanical properties

Gaopeng Zou,Yue Hong,Shuqin Wang,Shiheng Yin,Shumei Lei,Yi Wang,Huichao Zhu,Tongchun Kuang,Kesong Zhou
DOI: https://doi.org/10.1016/j.jallcom.2021.160146
IF: 6.2
2021-09-01
Journal of Alloys and Compounds
Abstract:<p>The hardness and toughness of W-N coating deposited by conventional magnetron sputtering (CMS) usually cannot be improved simultaneously. In this paper, a nitrogen (N) doped approach using high ionized plasma assisted coating (HIPAC) technology was used to challenge the inversion relationship. Reference pure W coatings were also deposited using the same process parameters without nitrogen. The effect of N dopants on the microstructure, mechanical and tribological properties of N-doped W(N) coatings was systematically investigated by electron microscopic methods, indenter tests and ball-on-disc sliding tests. The results indicate that the W(N) coatings have higher hardness, better toughness, more compact surface and finer columnar crystallites compared to pure W coatings. The preferred orientation changes from (110) to (222) with introducing N dopants. No brittle W-N compounds are detected in W(N) coatings. TEM observations reveal that part of the N dopants in W(N) coatings exist as solute atoms in the α-W solid solution, and the others are aggregated as N-clusters. Hence W(N) coatings can get the ceramic hardness (~ 30 GPa) and retain the metallic toughness. Benefiting from the high hardness, good toughness and reduced friction coefficient (~ 0.42), the wear rate coefficient of W(N) coatings is one order of magnitude lower than W coatings. Compared to the reported C and B atoms doped W(C/B) coatings produced by CMS, the W(N) coatings deposited by HIPAC in this paper can give a competitive strategy to achieve better mechanical properties.</p>
materials science, multidisciplinary,chemistry, physical,metallurgy & metallurgical engineering
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