Single-exposure profilometry using partitioned aperture wavefront imaging

Roman Barankov,Jerome Mertz
DOI: https://doi.org/10.1364/OL.38.003961
2013-07-20
Abstract:We demonstrate a technique for instantaneous measurements of surface topography based on the combination of a partitioned aperture wavefront imager with a standard lamp-based reflection microscope. The technique can operate at video rate over large fields of view, and provides nanometer axial resolution and sub-micron lateral resolution. We discuss performance characteristics of this technique, which we experimentally compare with scanning white light interferometry.
Optics
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