Abstract:Integrated quantum photonics leverages the on-chip generation of nonclassical states of light to realize key functionalities of quantum devices. Typically, the generation of such nonclassical states relies on whispering gallery mode resonators, such as integrated optical micro-rings, which enhance the efficiency of the underlying spontaneous nonlinear processes. While these kinds of resonators excel in maximizing either the temporal confinement or the spatial overlap between different resonant modes, they are usually associated with large mode volumes, imposing an intrinsic limitation on the efficiency and footprint of the device. Here, we engineer a source of time-energy entangled photon pairs based on a silicon photonic crystal cavity, implemented in a fully CMOS-compatible platform. In this device, resonantly enhanced spontaneous four-wave mixing converts pump photon pairs into signal/idler photon pairs under the energy-conserving condition in the telecommunication C-band. The design of the resonator is based on an effective bichromatic confinement potential, allowing it to achieve up to nine close-to-equally spaced modes in frequency, while preserving small mode volumes, and the whole chip, including grating couplers and access waveguides, is fabricated in a single run on a silicon-on-insulator platform. Besides demonstrating efficient photon pair generation, we also implement a Franson-type interference experiment, demonstrating entanglement between signal and idler photons with a Bell inequality violation exceeding five standard deviations. The high generation efficiency combined with the small device footprint in a CMOS-compatible integrated structure opens a pathway toward the implementation of compact quantum light sources in all-silicon photonic platforms.

Stimulated and spontaneous four-wave mixing in silicon-on-insulator coupled photonic wire nano-cavities

Simultaneous generation of four-wave mixing and stimulated Raman scattering in coupled lithium niobate microdisks mediated by second harmonic generation

Four-wave-mixing Gain and All-Optical Signal Processing in Silicon Nanowires

Six-wave mixing induced by free-carrier plasma in silicon nanowire waveguides

Silicon Coupled Cavities As a Flexible Platform for Integrated Nonlinear Photonics

High-Q and High-Order Side-Coupled Air-Mode Nanobeam Photonic Crystal Cavities in Silicon

Phase-Controlled Four-Wave Mixing with Pump Depletion in Compact Nonlinear Silicon Nitride Waveguides

Four wave mixing in 3C SiC Ring Resonators

Millimeter Wave Generation Using Four Wave Mixing in Silicon Waveguide

Four-Wave Mixing-Based Wavelength Conversion and Parametric Amplification in Submicron Silicon Core Fibers

Power-Attenuated Optimization for Four-Wave Mixing-Based Wavelength Conversion in Silicon Nanowire Waveguides

Polarization and Spatial Mode Dependent Four-Wave Mixing in a 4H-Silicon Carbide Microring Resonator

Broadband Incoherent Four-Wave Mixing and 27 Db Idler Conversion Efficiency Using Ultra-Silicon Rich Nitride Devices

Self-Phase Modulation and Nonlinear Loss in Silicon Nanophotonic Wires Near the Mid-Infrared Two-Photon Absorption Edge

Generation of entangled photon pairs from a silicon bichromatic photonic crystal cavity

High-efficiency optical frequency mixing in an all-dielectric metasurface enabled by multiple bound states in the continuum

Efficient four-wave mixing at the nanofocus of integrated organic gap plasmon waveguides on silicon

Demonstration of enhanced four-wave mixing by harnessing stimulated Brillouin scattering within a suspended cascaded microring resonator

Efficient and Broadband Four‐Wave Mixing in a Compact Silicon Subwavelength Nanohole Waveguide

4H-Sic Microring Resonators for Nonlinear Integrated Photonics.

4H-SiC microring opto-mechanical oscillator with a self-injection locked pump