Abstract:In this article, we present a deflection measurement setup for Atomic Force Microscopy (AFM). It is based on a quadrature phase differential interferometer: we measure the optical path difference between a laser beam reflecting above the cantilever tip and a reference beam reflecting on the static base of the sensor. A design with very low environmental susceptibility and another allowing calibrated measurements on a wide spectral range are described. Both enable a very high resolution (down to $\SI{2.5E-15}{m/\sqrt{Hz}}$), illustrated by thermal noise measurements on AFM cantilevers. They present an excellent long-term stability, and a constant sensitivity independent of the optical phase of the interferometer. A quick review shows that our precision is equaling or out-performing the best results reported in the literature, but for a much larger deflection range, up to a few $\SI{}{\micro m}$.

What problem does this paper attempt to address?

The problem that this paper attempts to solve is to improve the resolution and range of cantilever deflection measurement in Atomic Force Microscopy (AFM). Specifically, the author proposes a design based on a four - quadrant phase - difference interferometer for high - resolution force spectroscopy research. This design aims to overcome the limitations of traditional AFM detection methods in resolution and deflection range, while reducing the influence of environmental interference, and achieving long - term stability and high - sensitivity measurement. ### Main problems 1. **Improving resolution**: Although traditional AFM detection methods can provide relatively high resolution, in some applications, such as nanomechanical research, higher resolution is required to accurately measure tiny force changes. The method proposed in this paper can achieve extremely high resolution, as low as $2.5\times 10^{- 15}\text{m}/\sqrt{\text{Hz}}$. 2. **Expanding the deflection range**: Traditional methods are usually limited to a relatively small deflection range, which restricts their application to highly deformable objects. The four - quadrant phase - difference interferometer design proposed in this paper can extend the deflection range to several micrometers, thus being suitable for a wider range of application scenarios. 3. **Reducing environmental interference**: Environmental factors such as temperature drift and vibration can significantly affect the stability of measurement. The interferometer designed in this paper has low environmental sensitivity and can maintain stable measurement results over a long period of time. 4. **Calibration and stability**: Traditional methods may have different sensitivities under different optical phases and require frequent calibration. The method proposed in this paper has a constant sensitivity and does not require frequent calibration, which is suitable for long - term experiments. ### Solutions 1. **Four - quadrant phase - difference interferometer**: By measuring the optical path difference between the laser beam at the cantilever tip and the static substrate of the sensor, high - precision measurement of cantilever deflection is achieved. This design utilizes four - quadrant phase technology to convert the phase difference between two orthogonally polarized light beams into an electrical signal, thereby achieving high - resolution and large - range measurement. 2. **Multiple configurations**: - **Dual - path technique**: The sensitivity of measurement is increased through two reflections, but it is more sensitive to environmental vibration. - **Wollaston prism configuration**: It is easy to align and is suitable for cantilevers of various lengths and shapes, but it is more susceptible to environmental interference. - **Bi - calcite configuration**: It is insensitive to external interference, but it is only applicable to rectangular cantilevers. 3. **Thermal noise measurement**: The high - precision of this method is verified by measuring the thermal noise of the cantilever at rest. The experimental results show that the background noise is as low as $10^{-14}\text{m}/\sqrt{\text{Hz}}$, approaching the inevitable shot - noise limit of the photodetector. 4. **Long - term stability**: Experiments show that the drift of this method within several hours does not exceed 3nm, and it has excellent long - term stability. ### Summary This paper proposes an AFM deflection measurement method based on a four - quadrant phase - difference interferometer, which solves the deficiencies of traditional methods in terms of resolution, deflection range, environmental interference and stability. This method not only achieves extremely high resolution and large - range measurement, but also has good long - term stability and low background noise, and is suitable for high - resolution force spectroscopy research.

Quadrature phase interferometer for high resolution force spectroscopy

Towards High Accuracy Surface Profile Characterization in Atomic Force Microscopy

Quantitative Measurements of Electromechanical Response with a Metrological Atomic Force Microscope

A cantilever-based, ultrahigh-vacuum, low-temperature scanning probe instrument for multidimensional scanning force microscopy

Calibration of the Effective Spring Constant of Ultra-Short Cantilevers for A High-Speed Atomic Force Microscope

Long range metrological atomic force microscope with versatile measuring head

Very high frequency probes for atomic force microscopy with silicon optomechanics

Dual imaging-unit atomic force microscope for nanometer order length metrology based on reference scales

A comparsion of force sensors for atomic force microscopy based on quartz tuning forks and length extensional resonators

Accurate 3D Nanoscale Electromechanical Imaging with a Metrological Atomic Force Microscope

A Novel Atomic Force Microscope with High Stability and Scan Speed

Quantification of surface displacements and electromechanical phenomena via dynamic atomic force microscopy

Optomechanical Atomic Force Microscope.

A novel optical beam deflection detection system based on aspheric lens for high-speed atomic force microscope

Performance improvement of a large range metrological AFM through parasitic interference feedback artifacts removing by using laser multimode modulation method

Optical excitation of atomic force microscopy cantilever for accurate spectroscopic measurements

The Role of Nonlinear Dynamics in Quantitative Atomic Force Microscopy

Truncated Nonlinear Interferometry for Quantum-Enhanced Atomic Force Microscopy

High-resolution measurement of atomic force microscope cantilever resonance frequency

Characterization of strongly coupled quartz tuning fork sensors for precision force measurement in atomic force microscopy

Enhanced Accuracy of Force Application for AFM Nanomanipulation Using Nonlinear Calibration of Optical Levers