Graphene on silicon nitride for optoelectromechanical micromembrane resonators

Silvan Schmid,Tolga Bagci,Emil Zeuthen,Jacob M. Taylor,Patrick K. Herring,Maja C. Cassidy,Charles M. Marcus,Luis Guillermo Villanueva,Bartolo Amato,Anja Boisen,Yong Cheol Shin,Jing Kong,Anders S. Sørensen,Koji Usami,Eugene S. Polzik

DOI: https://doi.org/10.1063/1.4862296

2013-07-17

Abstract:Due to their exceptional mechanical and optical properties, dielectric silicon nitride (SiN) micromembrane resonators have become the centerpiece of many optomechanical experiments. Efficient capacitive coupling of the membrane to an electrical system would facilitate exciting hybrid optoelectromechanical devices. However, capacitive coupling of such dielectric membranes is rather weak. Here we add a single layer of graphene on SiN micromembranes and compare electromechanical coupling and mechanical properties to bare dielectric membranes and to membranes metallized with an aluminium layer. The electrostatic coupling of graphene coated membranes is found to be equal to a perfectly conductive membrane. Our results show that a single layer of graphene substantially enhances the electromechanical capacitive coupling without significantly adding mass, decreasing the superior mechanical quality factor or affecting the optical properties of SiN micromembrane resonators.

Mesoscale and Nanoscale Physics