Ab initio supported study on the selective adsorption-induced microstructural difference of (Ti,Al)N/TiN and (Ti,Al)N/ZrN multilayers
Jie Zhang,Yu X. Xu,Zhe R. Liu,Jian W. Du,Chun Hu,Li Chen,Yi Kong
DOI: https://doi.org/10.1016/j.apsusc.2023.157861
IF: 6.7
2023-06-25
Applied Surface Science
Abstract:Interface structure is essential for the mechanical properties of multilayers. Here, the effect of deposition process on the interface structure of arc-evaporated (Ti,Al)N/TiN and (Ti,Al)N/ZrN multilayers is studied by a combination of ab initio calculations and experiments. Based on x-ray diffractions and transmission electron microscope investigations, both multilayers with close modulation ratio and period reveal face centered cubic (fcc) structure with coherent interfaces. Nevertheless, thin (Ti,Zr)N layers are formed near the interfaces in (Ti,Al)N/ZrN multilayer, but are absent in (Ti,Al)N/TiN multilayer. Ab initio calculations suggest the selective absorption of Ti and Zr adatoms onto the surface of (Ti,Al)N/ZrN multilayer during deposition, which leads to the formation of (Ti,Zr)N-rich layers by interface. However, (Ti,Al)N/TiN multilayer is predicted to have almost constant surface adsorption of different adatoms.
chemistry, physical,physics, applied, condensed matter,materials science, coatings & films