Fast characterization of moving samples with nano-textured surfaces

Jørgen Garnæs,Maksim Zalkovskij,Mirza Karamehmedović,Morten Hannibal Madsen,Poul-Erik Hansen

DOI: https://doi.org/10.1364/optica.2.000301

IF: 10.4

2015-03-30

Optica

Abstract:Characterization of structures using conventional optical microscopy is restricted by the diffraction limit. Techniques such as atomic force and scanning electron microscopy can investigate smaller structures but are very time consuming. We show that using scatterometry, a technique based on optical diffraction, integrated into a commercial light microscope we can characterize nano-textured surfaces in a few milliseconds. The adapted microscope has two detectors, a CCD camera used to easily find an area of interest and a spectrometer for the measurements. We demonstrate that the microscope has a resolution in the nanometer range for the topographic parameters—height, width, and sidewall angle of a periodic grating—even in an environment with many vibrations, such as a production facility with heavy equipment.

optics