A heterogenous integrated neural recording system with elastocapillary self-assembled Au-PDMS-PEG neural probe and customized ASIC

Gang Wang,Changhua You,Liu Yang,Daoyin Liu,Huanhuan Zeng,Ning Xue,Lei Yao
DOI: https://doi.org/10.1088/1361-6439/ad6f1c
2024-08-17
Journal of Micromechanics and Microengineering
Abstract:This study presents the design and implementation of a heterogenous integrated neural recording system consisting of a flexible Au-PDMS-PEG probe and customized complementary metal oxide semiconductor (CMOS) application-specific integrated circuit (ASIC) in a standard 0.18 μm process. The flexible Au-PDMS-PEG probe was prepared by an elastocapillary self-assembled process, achieving an electrode impedance of 250 kΩ (@1 kHz). The customized CMOS ASIC contains 36 modular digital pixels (MDP). It achieves 5.69 μV rms input referred noise (IRN), 10.29 effective number of bits (ENOB), 49.5 μW power consumption, and 0.092 mm 2 area for a single MDP unit. Spontaneous spikes were also recorded in the mouse cortex, with a peak-to-peak amplitude of 389.2 μV PP and a signal-to-noise ratio (SNR) of 19.36. Benchtop and in-vivo experiments were conducted to validate the functionality and performance of the proposed neural recording system.
engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
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