Abstract:Amorphous oxide thin films play a fundamental role in state-of-the art interferometry experiments, such as gravitational wave detectors where these films compose the high reflectance mirrors of end and input masses. The sensitivity of these detectors is affected by thermal noise in the mirrors with its main source being the mechanical loss of the high index layers. These thermally driven fluctuations are a fundamental limit to optical interferometry experiments and there is a pressing need to understand the underlying processes that lead to mechanical dissipation in materials at room temperature. Two strategies are known to lower the mechanical loss: employing a mixture of Ta$_2$O$_5$ with $\approx$ 20\% of TiO$_2$ and post-deposition annealing, but the reasons behind this are not completely understood. In this work, we present a systematic study of the structural and optical properties of ion beam sputtered TiO$_2$-doped Ta$_2$O$_5$ films as a function of the annealing temperature. We show for the first time that low mechanical loss is associated with a material morphology that consists of nanometer sized Ar-rich bubbles embedded into an atomically homogeneous mixed titanium-tantalum oxide. When the Ti cation ratio is high, however, phase separation occurs in the film which leads to increased mechanical loss. These results indicate that for designing low mechanical loss mixed oxide coatings for interferometry applications it would be beneficial to identify materials with the ability to form ternary compounds while the dopant ratio needs to be kept low to avoid phase separation.

Measurements of a low temperature mechanical dissipation peak in a single layer of Ta2O5 doped with TiO2

Effect of heat treatment on mechanical dissipation in Ta$_2$O$_5$ coatings

TiO2 doping effect on reflective coating mechanical loss for gravitational wave detection at low temperature

Measurements of mechanical thermal noise and energy dissipation in optical dielectric coatings

Structure and morphology of low mechanical loss TiO$_2$-doped Ta$_2$O$_5$

Low temperature mechanical dissipation of an ion-beam sputtered silica film

Doping Effects of Ta on Conductivity and Microwave Dielectric Loss of MgTiO<sub>3</sub> Ceramics

Mechanical dissipation from charge and spin transitions in oxygen deficient SrTiO_3

Pressure and Temperature-Dependent Optical Properties of TiTa2O7

Measurements of Optical Scatter Versus Annealing Temperature for Amorphous Ta2O5 and TiO2:Ta2O5 Thin Films

Low mechanical loss and high refractive index in amorphous films grown by magnetron sputtering

In-vacuum measurements of optical scatter versus annealing temperature for amorphous Ta2O5 and TiO2:Ta2O5 thin films

Observation of interacting polaronic gas behavior in Ta-doped TiO 2 thin films via terahertz time-domain spectroscopy

Thermo-optic noise in coated mirrors for high-precision optical measurements

Observation of a Correlation Between Internal friction and Urbach Energy in Amorphous Oxides Thin Films

Measurement of the mechanical loss of a cooled reflective coating for gravitational wave detection

Measurement of Thermal Noise in Multilayer Coatings with Optimized Layer Thickness

Direct Measurement of Coating Thermal Noise in Optical Resonators

Oxygen diffusion in freestanding body centered cubic tantalum structural thin films in air and in high vacuum

Dissipation of micro-cantilevers as a function of air pressure and metallic coating

Observation of Temperature Induced Phase Transitions in TiO Superconducting Thin Film Via Infrared Measurement