Abstract:In strained mechanical resonators, the concurrence of tensile stress and geometric nonlinearity dramatically reduces dissipation. This phenomenon, dissipation dilution, is employed in mirror suspensions of gravitational wave interferometers and at the nanoscale, where soft-clamping and strain engineering have allowed extremely high quality factors. However, these techniques have so far only been applied in amorphous materials, specifically silicon nitride. Crystalline materials exhibit significantly lower intrinsic damping at cryogenic temperatures, due to the absence of two level systems in the bulk, as exploited in Weber bars and silicon optomechanical cavities. Applying dissipation dilution engineering to strained crystalline materials could therefore enable extremely low loss nanomechanical resonators, due to the combination of reduced internal friction, high intrinsic strain, and high yield strength. Pioneering work has not yet fully exploited this potential. Here, we demonstrate that single crystal strained silicon, a material developed for high mobility transistors, can be used to realize mechanical resonators with ultralow dissipation. We observe that high aspect ratio ($>10^5$) strained silicon nanostrings support MHz mechanical modes with quality factors exceeding $10^{10}$ at 7 K, a tenfold improvement over values reported in silicon nitride. At 7 K, the thermal noise-limited force sensitivity is approximately $45\ \mathrm{{zN}/{\sqrt{Hz}}}$ - approaching that of carbon nanotubes - and the heating rate is only 60 quanta-per-second. Our nanomechanical resonators exhibit lower dissipation than the most pristine macroscopic oscillators and their low mass makes them particularly promising for quantum sensing and transduction.

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Optical probing of mechanical loss of a Si_{3}N_{4} membrane below 100 mK

Microwave characterisation of CaF2 at cryogenic temperatures using a dielectric resonator technique

Loss mechanisms in superconducting thin film microwave resonators

Low Temperature Properties of Low-Loss Macroscopic Lithium Niobate Bulk Acoustic Wave Resonators

Anomalous Thermal Conductivity Enhancement in Low Dimensional Resonant Nanostructures Due to Imperfections

Ultralow Dissipation Nanomechanical Devices from Monocrystalline Silicon Carbide

Signatures of two-level defects in the temperature-dependent damping of nanomechanical silicon nitride resonators

The Observation of the Low-Frequency Acoustic Phonon Torsional Modes in Nanocrystalline Silicon

Thin film metrology and microwave loss characterization of indium and aluminum/indium superconducting planar resonators

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Strained crystalline nanomechanical resonators with ultralow dissipation

Mechanical losses and stability performance of NEXCERA in ultra-stable laser cavities

Sub-ppm Nanomechanical Absorption Spectroscopy of Silicon Nitride

Cavity resonator for dielectric measurements of high-ε, low loss materials, demonstrated with barium strontium zirconium titanate ceramics.

Phonon Elastic Scattering on Two-Level Systems in Cryogenic Piezoelectric Crystals

Vibrational modes as the origin of dielectric loss at 0.27$\unicode{x2013}$100 THz in a-SiC:H

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Characterization of process-related interfacial dielectric loss in aluminum-on-silicon by resonator microwave measurements, materials analysis, and imaging