Abstract:The frequency stability of nanomechanical resonators (NMR) dictates the performance level of many state-of-the-art sensors (e.g., mass, force, temperature, radiation) that relate an external physical perturbation to a resonance frequency shift. While this is obviously of fundamental importance, accurate models and understandings of sources of frequency instability are not always available. The contribution of thermomechanical noise to frequency stability has been well studied in recent years and is often the fundamental performance limitation. Frequency stability limited by thermal fluctuation noise has attracted less interest but is nevertheless of fundamental importance notably in temperature sensing applications. In particular, temperature-sensitive NMR have become promising candidates for replacing traditional bolometers in infrared radiation sensing. However, reaching the ultimate detectivity limit of thermal radiation sensors requires their noise to be dominated by fundamental thermal fluctuation, which has not been demonstrated to date. In this work, we first develop a theoretical model for computing the frequency stability of NMR by considering the effect of both additive phase noise (i.e., thermomechanical, and experimental detection noise) and thermal fluctuation noise in a close-loop frequency tracking scheme. We thereafter validate this model experimentally and observe thermal fluctuation noise in SiN drum resonators of various sizes. Our work shows that by using resonators of specific characteristics--such as high temperature sensitivity, high mechanical quality factors, and high mass-to-thermal-conductance ratio--one can minimize additive phase noise below thermal fluctuation noise. This paves the way for NMR-based radiation sensors that can reach the fundamental detectivity limit of thermal radiation sensing and outperform existing technologies.

Signatures of two-level defects in the temperature-dependent damping of nanomechanical silicon nitride resonators

Elastic Strain Engineered Nanomechanical GaN Resonators with Thermoelastic Dissipation Dilution Up to 600 K

Damping of metallized bilayer nanomechanical resonators at room temperature

Strained crystalline nanomechanical resonators with ultralow dissipation

Intrinsic dissipation in nanomechanical resonators due to phonon tunneling

Anomalous Thermal Conductivity Enhancement in Low Dimensional Resonant Nanostructures Due to Imperfections

Thermal transport and frequency response of localized modes on low-stress nanomechanical silicon nitride drums featuring a phononic bandgap structure

Soft-clamped phononic dimers for mechanical sensing and transduction

Optical probing of mechanical loss of a Si_{3}N_{4} membrane below 100 mK

Resonant nonlinear response of a nanomechanical system with broken symmetry

Energy losses of nanomechanical resonators induced by atomic force microscopy-controlled mechanical impedance mismatching

Ultrahigh-quality-factor micro- and nanomechanical resonators using dissipation dilution

Nanomechanical Dissipation and Strain Engineering

Centimeter-scale nanomechanical resonators with low dissipation

Effect of helium-ion implantation on -SiC nanomechanical string resonators

Effect of Helium Ion Implantation on 3C-SiC Nanomechanical String Resonators

Symmetry breaking in a mechanical resonator made from a carbon nanotube

Demonstration of Frequency Stability limited by Thermal Fluctuation Noise in Silicon Nitride Nanomechanical Resonators

Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding $10^8$

Influence of clamp-widening on the quality factor of nanomechanical silicon nitride resonators

Microscopic nanomechanical dissipation in gallium arsenide resonators