Abstract:As actuator of the force-rebalanced servo loop, the electrostatic force generator of the micro-accelerometer shows high nonlinearity while the interpole of the micro-electro-mechanical system(MEMS) sensor is far away from its balance position. The control system cannot rebalance itself with the limited bandwidth after an external long overload, because the characteristics of the force generator differ from normal case. Although for similar problems, solutions with cascading lead-lag blocks, with the anti-windup(AW) technology, or with the sliding-mode control, are widely reported, the problems such as performance loss or difficulty to synthesize a digital controller still remain. Based on existing researches, remedies are developed by analyzing the characteristic of the system not only near the balance position, but also corresponding to the whole moveable range of the interpole, and a new controller is proposed. The solution is compared with the common solutions of cascading lead-lag blocks method, AW methods, and sliding mode methods. Comparison results show that the proposed solution avoid performance loss, compared to cascading lead-lag blocks solution; the proposed solution is easily synthesized and implemented in the analog servo loop of the micro-accelerometer, compared to digital AW methods; at the same time, the proposed solution avoids suffering the chattering effect problem but just utilize it, compared to the sliding-mode control solution. Nevertheless, comparison results show the solution is lack of commonality, since the solution is only more suitable to micro electrostatic force-rebalance system. The SIMULINK models with and without the proposed solution, taking typical micro-accelerometer parameters, have been set up for simulation; corresponding experiments utilizing electrometric method are also conducted after the successful simulations. Simulation and experiment results verify that the micro-accelerometer will reliably return to normal operation after external long overload with the proposed solution. Therefore, it is expected to design the analog servo loop of high performance micro electrostatic force-rebalance system so as to ensure the rebalance after long overload without performance loss.

Research on Oscillation Suppression Control Method for Contact Scanning Motion

Research On Control Technologies For A High-Precision Multi-Source Vibration Simulation System

Detecting Oscillations Via Adaptive Chirp Mode Decomposition.

Vibration Suppression of a High-Speed Macro-Micro Integrated System Using Computational Optimal Control

Scanning control based on real-time contact force feedback for ultrasonic thickness measurement

Contact Control of Ultrasonic Scanning Robot

Investigation on an Adaptive Method for Tonal Vibration Suppression

Combining Input Shaping and Adaptive Model-Following Control for Vibration Suppression

A Vibration Mitigation Approach for Inverter-fed Permanent Magnet Motor Drive System

Research on the Principle and Suppression Method of Micro-Vibration Generation in a Spatial Optoelectronic Mechanism

Research on the mathematical model and design of a three loop controller for the oscillating scanning system of a laser line scanning galvanometer

A Modified Disturbance Observer Structure Based on Acceleration Measurement for Disturbance Suppression in Tracking Control System

Force Tracking Control Method for Robotic Ultrasound Scanning System under Soft Uncertain Environment

Analysis and Prevention for Oscillation Failure of Capacitive Micro-Accelerometers

Dynamic Compensation Strategy for Scanning Error of Contact Probe Based on Damping Ratio and Frequency Mapping

Motion control of automatic ultrasonic fault detector based on error compensating PID regulation

Study on Simulation for Eliminating Payload Oscillation of Overhead Cranes

Optimal Switching Time Control for Suppressing Residual Vibration in a High-Speed Macro-Micro Manipulator System

Variable fractional order sliding mode control for seismic vibration suppression of building structure

Motion Control of Wafer Scanners in Lithography Systems: from Setpoint Generation to Multi-Stage Coordination

Research on anti-swing control strategies for three-dimensional overhead cranes with non-stationary enhanced swing angle suppression