Effect of Structural Changes of Pd/WO 3 Thin Films on Response Direction and Rate in Hydrogen Detection
Seung-Ik Han,Mohit Kumar,Le Thai Duy,Rubaya Yeasmin,Chiwan Park,Gwanggyo Jung,Hyunsup Kim,Amir Sohail Khan,Hyunmin Dang,Hyungtak Seo
DOI: https://doi.org/10.1016/j.snb.2023.135259
IF: 9.221
2024-01-02
Sensors and Actuators B Chemical
Abstract:Hydrogen (H 2 ) has attracted considerable attention as a renewable energy carrier owing to its recyclability and environmental friendliness. However, due to its explosive nature at concentrations above 4% in air, the detection of H 2 is a critical safety concern. Thereby, this study investigates the impact of the growth forms of the Pd/WO 3 thin film layer on the sensor's ability to detect H 2 , including the response direction and rate of the sensor's resistance change. The chemoresistive sensors were constructed using a nanoporous WO 3 film (formed via RF sputtering on a Si/SiO 2 wafer) and a palladium layer (deposited via e-beam evaporation). Experimental results display the excellent hydrogen detection performance of the sensors at concentrations ranging from 1- 10% (in air) by the change of chemoresistance and demonstrate that the strategies used in fabricating the sensors are effective for practical use. By gaining a deeper understanding of the hydrogen sensing mechanisms in Pd/WO 3 thin films, this study reveals how to improve the performance of hydrogen sensors and ensure their safe use in various industries.
chemistry, analytical,electrochemistry,instruments & instrumentation