Structural and Electronic Properties of Amorphous and Polycrystalline In2Se3 Films

A. Chaiken,K. Nauka,G.A. Gibson,Heon Lee,C.C. Yang,J. Wu,J.W. Ager,K.M. Yu,W. Walukiewicz
DOI: https://doi.org/10.1063/1.1592631
2003-03-20
Abstract:Structural and electronic properties of amorphous and single-phase polycrystalline films of gamma- and kappa-In2Se3 have been measured. The stable gamma phase nucleates homogeneously in the film bulk and has a high resistivity, while the metastable kappa phase nucleates at the film surface and has a moderate resistivity. The microstructures of hot-deposited and post-annealed cold-deposited gamma films are quite different but the electronic properties are similar. The increase in the resistivity of amorphous In2Se3 films upon annealing is interpreted in terms of the replacement of In-In bonds with In-Se bonds during crystallization. Great care must be taken in the preparation of In2Se3 films for electrical measurements as the presence of excess chalcogen or surface oxidation may greatly affect the film properties.
Materials Science
What problem does this paper attempt to address?
The problem that this paper attempts to solve is to understand the structural and electronic properties of indium selenide (In\(_2\)Se\(_3\)) thin films under different deposition conditions and post - treatments. Specifically, the researchers are concerned with: 1. **Phase formation and stability**: Determine the specific phase states (such as γ - phase and κ - phase) of indium selenide thin films formed under different conditions, as well as the stability and transformation mechanisms of these phase states. For example, it has been found that the γ - phase nucleates uniformly inside the thin film and has a high resistivity, while the κ - phase nucleates on the surface of the thin film and has a moderate resistivity. 2. **Relationship between structure and electronic properties**: Explore the relationship between the microstructure and electronic properties of different phase states (especially γ - phase and κ - phase). For example, although the γ - phase thin films deposited by thermal deposition and post - annealing cold deposition have different microstructures, their electronic properties are similar. 3. **Effects of deposition and treatment conditions on thin - film properties**: Study how different deposition methods (such as co - evaporation, sputtering, etc.) and post - treatment conditions (such as annealing temperature, atmosphere, etc.) affect the structure and electronic properties of indium selenide thin films. For example, excessive selenium or surface oxidation may significantly affect the electrical properties of the thin film. 4. **Physical mechanisms to explain experimental phenomena**: Explain some observed phenomena through experimental data. For example, the reason for the increase in resistivity of amorphous indium selenide thin films during annealing is explained as the replacement of In - In bonds by In - Se bonds. In summary, this paper aims to deeply understand the structural and electronic properties of indium selenide thin films under different preparation and treatment conditions, thereby providing theoretical basis and technical guidance for optimizing their performance in applications such as solar cells and optical recording media.