Abstract:The diffraction efficiencies of a Fresnel zone plate (ZP), fabricated by Xradia Inc. using the electron-beam writing technique, were measured using polarized, monochromatic synchrotron radiation in the extreme ultraviolet wavelength range 3.4-22 nm. The ZP had 2 mm diameter, 3330 zones, 150 run outer zone width, and a 1 mm central occulter. The ZP was supported by a 100 rim thick Si3N4 membrane. The diffraction patterns were recorded by CMOS imagers with phosphor coatings and with 5.2 mu m or 48 mu m pixels. The focused +n orders (n=1-4), the diverging -1 order, and the undiffracted 0 order were observed as functions of wavelength and off-axis tilt angle. Sub-pixel focusing of the +n orders was achieved. The measured efficiency in the +1 order was in the 5% to 30% range with the phase-shift enhanced efficiency occurring at 8.3 nm where the gold bars are partially transmitting. The +2 and higher order efficiencies were much lower than the +1 order efficiency. The efficiencies were constant when the zone plate was tilted by angles up to +/- 1 degrees from the incident radiation beam. This work indicates the feasibility and benefits of using zone plates to measure the absolute EUV spectral emissions from solar and laboratory sources: relatively high EUV efficiency in the focused +1 order, good out-of-band rejection resulting from the low higher-order efficiencies and the ZP focusing properties, insensitivity to (unfocused) visible light scattered by the ZP, flat response with off-axis angle, and insensitivity to the polarization of the radiation based on the ZP circular symmetry. EUV sensors with Fresnel zone plates potentially have many advantages over existing sensors intended to accurately measure absolute EUV emission levels, such as those implemented on the GOES N-P satellites that use transmission gratings which have off-axis sensitivity variations and poor out-of-band EUV and visible light rejection, and other solar and laboratory sensors using reflection gratings which are subject to response variations caused by surface contamination and oxidation.

Reference Phase of Fresnel Zone Plates

Optimized Phase Retrieval Method Based on Multi-Focus Property of Zone Plate

Fresnel diffraction of cylindrical and spherical wavefronts from a phase plate

Square Fresnel Zone Plate with Spiral Phase for Generating Zero Axial Irradiance.

Method for a Deflection-Type Refractometer Measuring the Fringe Shift by Using Linear Fresnel Zone Plates.

X-ray Imaging Fresnel Zone Plates and Fabrication

Ray Aberrations Analysis for Phase Plates Illuminated by Off-Axis Collimated Beams.

Dual-band and Dual-Polarized Reflective Fresnel Zone Plate Design Based on Fractal Shape

Simulation of an X-ray Fresnel Zone Plate with Nonideal Factors

Imaging of weak phase objects with a Zernike phase plate

Measurement of Zone Plate Efficiencies in the Extreme Ultraviolet and Applications to Radiation Monitors for Absolute Spectral Emission

Fabrication and application of X-ray zone plates

Focusing properties of Fresnel zone plates with spiral phase.

Demonstrations of the Diffraction and Dispersion Phenomena of Part Fresnel Phase Zone Plates

Fractal zone plates for wideband imaging with low chromatic aberration and extended depth of field

Millimeter-wave Fresnel-zone plate lens and antenna

Characterization of Relative Diffraction Performance of Soft X-Ray Zone Plates by Experiment

Quantitative phase imaging based on Fresnel diffraction from a phase plate

Investigation of Axial and Transverse Focal Spot Sizes of Fresnel Zone Plates.

Performance Test of Fresnel Zone Plate with 50 nm Outermost Zone Width in Hard X-ray Region

Optimum design of aspect ratio limited x-ray zone plates