Optimum design of aspect ratio limited x-ray zone plates

Cameron M. Kewish,Sergey Gorelick,David M. Paganin,Martin D. de Jonge

DOI: https://doi.org/10.1364/optica.505082

IF: 10.4

2024-02-09

Optica

Abstract:Cameron M. Kewish, Sergey Gorelick, David M. Paganin, Martin D. de Jonge Fresnel zone plates are widely used for nanofocusing in x-ray microscopy. The focusing performance is described in terms of the resolution, ... [Optica 11, 251-262 (2024)]

optics

What problem does this paper attempt to address?

Design of objective lens with reflective spherical Fresnel zone plate

Zhenrong Zheng,Xütao Sun,Peifu Gu,Xü Liu

DOI: https://doi.org/10.1007/s12200-008-0036-y

2008-01-01

Frontiers of Optoelectronics in China

Abstract:An objective lens composed of a spherical Fresnel zone plate mirror and aspheric mirrors is designed. The Fresnel zone plate with a spherical shape is analyzed, and the method to approximately replace the aspherical mirror with spherical Fresnel zone plate is deduced. The objective lens is designed with a single spherical Fresnel zone plate mirror and three aspherical mirrors. Under the condition of 100 × magnification, 2.5 Fresnel number and 120° field angle, the modulation transfer function can reach above 40% at 0.6 line pairs/mm on the magnification side, and the distortion is less than 2.2%. This method can provide a reference for the application of Fresnel zone plate in visible light imaging, and has a bright future with the continuous development of the fabrication technique of Fresnel devices.
Design and Fabrication of High Aspect-ratio Hard X-ray Zone Plates

Jie FU,Xiaohua WANG,Jinhua LI,Xuan FANG,Zhipeng WEI

DOI: https://doi.org/10.3969/j.issn.1003-501X.2014.03.002

2014-01-01

Abstract:The manufacture of high aspect-ratio hard X-ray zone plates for Inertial Confinement Fusion (ICF) experiment by using electron beam lithography and X-ray lithography was demonstrated. The X-ray lithography mask was first fabricated on hollow polyimide film to reduce the back-scattering during electron-beam lithography process. Then multiple X-ray exposures and full water electroplating method were used to increase the lodging resistance of the resist pattern. The zone plates with outermost zone width of 350 nm, profile thickness of 3.5μm, and aspect ratio of 10, were successfully fabricated by using the combined technology. The structure of zone plates is steep and has excellent graphics quality,and can be used for 10 to 30 keV X-ray imaging system.
High-efficiency focusing and imaging by dielectric kinoform zone plate lenses with soft X-rays.

Xujie Tong,Yifang Chen,Zijian Xu,Yijie Li,Zhenjiang Xing,Chengyang Mu,Jun Zhao,Xiangjun Zhen,Chengwen Mao,Renzhong Tai

DOI: https://doi.org/10.1107/S1600577522012115

IF: 2.557

2023-01-01

Journal of Synchrotron Radiation

Abstract:With fast advances in enhancing the focusing/imaging resolution of Fresnel zone plate lenses toward sub-10 nm, low diffraction efficiency in connection with their rectangular zone shape still remains a big issue in both soft and hard X-ray microscopy. In hard X-ray optics, encouraging progress has recently been reported in our earlier attempts of high focusing efficiency by 3D kinoform shaped metallic zone plates, formed by greyscale electron beam lithography. This paper addresses our efforts towards high focusing/imaging efficiency by developing a novel dielectric kinoform zone plate lens for soft X-rays. The effects of the zone materials and zone shapes on the focusing/imaging quality were first theoretically investigated by a modified thin-grating-approximation method, revealing superior efficiencies of dielectric kinoform zone plates over rectangular ones in metals. Optical characterizations of replicated dielectric kinoform zone plates by greyscale electron beam lithography demonstrate a focusing efficiency of 15.5% with a resolution of 110 nm in the water window of X-rays. Apart from high efficiency, the novel kinoform zone plate lenses developed in this work exhibit significant advantages over conventional zone plates, i.e. simplified process, low cost and no need for a beamstop.
Designing of Extended Frsenel Zone Plates for Focusing X-rays

国承山,任秀云,刘轩

DOI: https://doi.org/10.3969/j.issn.1672-755x.2004.02.003

2004-01-01

Abstract:We propose a novel method for extending the effective size of Fresnel zone plates (FZP) under the limitation of the smallest structure that can be fabricated by lithography today. This kind of extended Fresnel zone plates (EFZP) consists of two parts: the inner part and the outer part. The inner part is the same as the conventional FZP, while in the outer part the zones are produced by suitable extension based on the conventional FZP. The principle of the EFZP, some related design formulas and simulated results are given, which indicate that EFZP possesses higher resolution and smaller sub-maximum noise than those of the corresponding conventional FZP.
Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography

Longhua Liu,Gang Liu,Ying Xiong,Jie Chen,Chunlei Kang,Xinlong Huang,Yangchao Tian

DOI: https://doi.org/10.1007/s00542-007-0542-7

2008-01-01

Microsystem Technologies

Abstract:High focusing efficiency Fresnel zone plates for hard X-ray imaging is fabricated by electron beam lithography, soft X-ray lithography, and gold electroplating techniques. Using the electron beam lithography, Fresnel zone plates which has an outermost zone width of 100 nm and thickness of 250 nm has been fabricated. Fresnel zone plates with outermost zone width of 150 nm and thickness of 660 nm has been fabricated by using soft X-ray lithography.
Interlaced zone plate optics for hard X-ray imaging in the 10 nm range

Istvan Mohacsi,Ismo Vartiainen,Benedikt Rösner,Manuel Guizar-Sicairos,Vitaliy A. Guzenko,Ian McNulty,Robert Winarski,Martin V. Holt,Christian David

DOI: https://doi.org/10.1038/srep43624

IF: 4.6

2017-03-08

Scientific Reports

Abstract:Multi-keV X-ray microscopy has been particularly successful in bridging the resolution gap between optical and electron microscopy. However, resolutions below 20 nm are still considered challenging, as high throughput direct imaging methods are limited by the availability of suitable optical elements. In order to bridge this gap, we present a new type of Fresnel zone plate lenses aimed at the sub-20 and the sub-10 nm resolution range. By extending the concept of double-sided zone plate stacking, we demonstrate the doubling of the effective line density and thus the resolution and provide large aperture, singlechip optical devices with 15 and 7 nm smallest zone widths. The detailed characterization of these lenses shows excellent optical properties with focal spots down to 7.8 nm. Beyond wave front characterization, the zone plates also excel in typical imaging scenarios, verifying their resolution close to their diffraction limited optical performance.

multidisciplinary sciences
High-efficiency multilevel zone plates for keV X-rays

E. Di Fabrizio,F. Romanato,M. Gentili,S Cabrini,B. Kaulich,J. Susini,R. Barrett

DOI: https://doi.org/10.1038/44791

IF: 64.8

1999-10-01

Nature

Abstract:The development of high brilliance X-ray sources coupled with advances in manufacturing technologies has led to significant improvements in submicrometre probes for spectroscopy, diffraction and imaging applications. The generation of a small beam spot size is commonly based on three principles1: total reflection (as used in optical elements involving mirrors or capillaries), refraction (such as in refractive lenses2) and diffraction. The latter effect is employed in Bragg–Fresnel or Soret lenses, commonly known as Fresnel zone plate lenses. These lenses currently give the best spatial resolution, but are traditionally limited to rather soft X-rays—at high energies, their use is still limited by their efficiency. Here we report the fabrication of high-efficiency, high-contrast gold and nickel multistep (quaternary) Fresnel zone plates using electron beam lithography. We achieve a maximum efficiency of 55% for the nickel plate at 7 keV. In addition to their high efficiency, the lenses offer the advantages of low background signal and effective reduction of unwanted diffraction orders. We anticipate that these lenses should have a significant impact on techniques such as microscopy3, micro-fluorescence4 and micro-diffraction5, which require medium resolution (500–100 nm) and high flux at fixed energies.

multidisciplinary sciences
A Compound Kinoform/Fresnel Zone Plate Lens with 15 Nm Resolution and High Efficiency in Soft X-Ray.

Xujie Tong,Yifang Chen,Chengyang Mu,Qiucheng Chen,Xiangzhi Zhang,Guang Zeng,Yuchun Li,Zijian Xu,Jun Zhao,Xiangjun Zhen,Chengwen Mao,Hongliang Lu,Renzhong Tai

DOI: https://doi.org/10.1088/1361-6528/acb946

IF: 3.5

2023-01-01

Nanotechnology

Abstract:X-ray microscope as an important nanoprobing tool plays a prevailing role in nano-inspections of materials. Despite the fast advances of high resolution focusing/imaging reported, the efficiency of existing high-resolution zone plates is mostly around 5% in soft x-ray and rapidly goes down to 1%-2% when the resolution approaches 10 nm. It is well known that the rectangular zone shape, beamstop, limited height/width ratios, material absorption of light and structural defects are likely responsible for the limited efficiency. Although zone plates with Kinoform profile are supposed to be efficient, progress for achieving both high resolution (<30 nm) and high efficiency (>5%) have hardly been addressed in soft x-ray. In this work, we propose a compound Kinoform/Fresnel zone plate (CKZP) by combing a dielectric Kinoform zone plate with a 15 nm resolution zone plate. Greyscale electron beam lithography was applied to form the 3D Kinoform zone plate and atomic layer deposition was carried out to form the binary zone plate. Optical characterizations demonstrated 15 nm resolution focusing/imaging with over 7.8% efficiency in soft x-ray. The origin of the efficiency improvement behind the proposed compound lens is theoretically analyzed and discussed.
Fabrication and application of X-ray zone plates

Xiangdong Xu,Yilin Hong,Shaojun Fu,Yunwu Zhang

1999-01-01

Guangxue Jishu/Optical Technique

Abstract:Owing to the low diffraction efficiency of zone plates, their application in the visible range is quite limited; however, in the X-ray range, they are the only one that can reach the diffraction limit so as to realize the theoretical resolution limit, hence there is considerable renewed interest in the zone plates now. An introduction on their fabrication method and applications was made here, besides, a review on the background, basic concepts, and classification of Fresnel zone plate and Bragg-Fresnel zone plate, which are the optical elements used for X-ray focusing and imaging, was also given.
Simulation of an X-ray Fresnel Zone Plate with Nonideal Factors

Jie Chen,Quanping Fan,Junhua Wang,Dengpeng Yuan,Lai Wei,Qiangqiang Zhang,Junsheng Liao,Min Xu

DOI: https://doi.org/10.3807/COPP.2020.4.1.009

2020-01-01

Current Optics and Photonics

Abstract:Fresnel zone plates have been widely used in many applications, such as x-ray telescopes, microfluore-scence, and microimaging To obtain an x-ray Fresnel zone plate, many fabrication methods, such as electron-beam etching, ion-beam etching and chemical etching, have been developed. Fresnel zone plates fabricated by these methods will inevitably lead to some nonideal factors, which have an impact on the focusing characteristics of the zone plate. In this paper, the influences of these nonideal factors on the focusing characteristics of the zone plate are studied systematically, by numerical simulations based on scalar diffraction theory. The influence of the thickness of a Fresnel zone plate on the absolute focusing efficiency is calculated for a given incident x-ray's wavelength. The diffraction efficiency and size of the focal spot are calculated for different incline angles of the groove. The simulations of zone plates without struts, with regular struts, and with random struts are carried out, to study the effects of struts on the focusing characteristics of a zone plate. When a Fresnel zone plate is used to focus an ultrashort x-ray pulse, the effect of zone-plate structure on the final pulse duration is also discussed.
X-ray Imaging Fresnel Zone Plates and Fabrication

CHEN Jie,LIU Long-hua,LIU Gang,TIAN Yang-chao

DOI: https://doi.org/10.3321/j.issn:1004-924x.2007.12.012

2007-01-01

Optics and Precision Engineering

Abstract:In order to investigate the principle and fabrication technique of Fresnel zone plates(FZPs),a diffractive optical element used in X-ray imaging with the best resolution currently is presented.A theoretical analysis of the spatial resolution depending on the outermost zone width is given.An analyrical expression of the diffraction efficiency in terms of thickness and X-ray refractive index of the zone plate is also provided.Electron beam lithography combined with X-ray lithography is employed to fabricate FZPs.Experimental results indicate that the outermost zone width is 150 nm and the aspect ratio is 4,which satisfies the X-ray imaging system requirements of high resolution.high aspect ratio as well as high precision.
Use of Fractal Zone Plates for Transmission X-ray Microscopy

Xin Ge,Zhili Wang,Kun Gao,Dajiang Wang,Zhao Wu,Jian Chen,Zhiyun Pan,Kai Zhang,Youli Hong,Peiping Zhu,Ziyu Wu

DOI: https://doi.org/10.1007/s00216-012-6126-0

2012-01-01

Analytical and Bioanalytical Chemistry

Abstract:In this contribution we discuss the possibility of designing a modified transmission X-ray microscope by using fractal zone plates (Fzps) as diffractive optical elements. In the modified transmission X-ray microscope optical layout, we first introduced a fractal zone plate as the microscope objective. Indeed, a fractal zone plate cannot only be used as an image-forming component but also as a condenser element to achieve an extended depth of field. Numerical analysis reveals that fractal zone plates and conventional Fresnel zone plates have similar imaging capabilities under different coherent illumination. Using a fractal zone plate as a condenser we also simulated axial irradiance. Results confirm that fractal zone plates can improve focusing capability with an extended depth of field. Although preliminary, these simulations clearly reveal that fractal zone plates, when available, will be of great help in microscope layouts, in particular for foreseen high-resolution applications in the "water window" as strongly required in biological research.
Fabrication of X-ray Imaging Zone Plates by E-Beam and X-ray Lithography

Longhua Liu,Gang Liu,Ying Xiong,Jie Chen,Wenjie Li,Yangchao Tian

DOI: https://doi.org/10.1007/s00542-009-0972-5

2009-01-01

Microsystem Technologies

Abstract:X-ray imaging and microscopy techniques have been developed in worldwide due to their capabilities of large penetration power and high spatial resolution. Fresnel zone plates is considered to be one of the most convenient optic devices for X-ray imaging and microscopy system. The zone plates with aspect ratio of 7 and 13 have been fabricated by e-beam lithography combined with X-ray lithography in this paper. Firstly, the X-ray lithography mask of zone plates with outermost zone width of 100 nm was fabricated by e-beam lithography and gold electroplating techniques. Secondly, the zone plates with gold profile thickness of 700 and 1,300 nm were replicated by X-ray lithography and gold electroplating techniques. X-ray imaging and microscopy techniques were introduced to characterize the high-aspect-ratio zone plates' inner structures. At the X-ray energy of 7.5 keV, the first-order focusing efficiency of zone plates with gold profile thickness of 700 nm is about 8.63%.
A study of structural effects on the focusing and imaging performance of hard X‐rays with 20–30 nm zone plates

Xujie Tong,Vishal Dhamgaye,Qiucheng Chen,Qingxin Wu,Biao Deng,Ling Zhang,Oliver Fox,Hongchang Wang,Jun Zhao,Yifang Chen,Zijian Xu,Peng Li,Kawal Sawhney

DOI: https://doi.org/10.1107/s1600577524009615

IF: 2.557

2024-10-29

Journal of Synchrotron Radiation

Abstract:This work reports the structural effects on the focusing and imaging efficiency of 20–30 nm‐resolution zone plates at Diamond Light Source and Shanghai Synchrotron Radiation Facility. The zone width and the duty cycle were optimized using a modified beam‐propagation method for peak efficiency, and the effect of residual resist was also explored using simulation and experimental measurements.Hard X‐ray microscopes with 20–30 nm spatial resolution ranges are an advanced tool for the inspection of materials at the nanoscale. However, the limited efficiency of the focusing optics, for example, a Fresnel zone plate (ZP) lens, can significantly reduce the power of a nanoprobe. Despite several reports on ZP lenses that focus hard X‐rays with 20 nm resolution – mainly constructed by zone‐doubling techniques – a systematic investigation into the limiting factors has not been reported. We report the structural effects on the focusing and imaging efficiency of 20–30 nm‐resolution ZPs, employing a modified beam‐propagation method. The zone width and the duty cycle (zone width/ring pitch) were optimized to achieve maximum efficiency, and a comparative analysis of the zone materials was conducted. The optimized zone structures were used in the fabrication of Pt‐hydrogen silsesquioxane (HSQ) ZPs. The highest focusing efficiency of the Pt‐HSQ‐ZP with a resolution of 30 nm was 10% at 7 keV and >5% in the range 6–10 keV, whereas the highest efficiency of the Pt‐HSQ‐ZP with a resolution of 20 nm was realized at 7 keV with an efficiency of 7.6%. Optical characterization conducted at X‐ray beamlines demonstrated significant enhancement of the focusing and imaging efficiency in a broader range of hard X‐rays from 5 keV to 10 keV, demonstrating the potential application in hard X‐ray focusing and imaging.

optics,physics, applied,instruments & instrumentation
A dielectric Kinoform zone plate with 15 nm resolution and high efficiency for soft X-ray optics

Xujie Tong,Yifang Chen,Chengyang Mu,Qiucheng Chen,Xiangzhi Zhang,Guang Zeng,Yu-Chun Li,Zijian Xu,Jun Zhao,Xiangjun Zhen,Chengwen Mao,Hongliang Lu,Renzhong Tai

DOI: https://doi.org/10.21203/rs.3.rs-1353055/v1

2022-01-01

Abstract:Abstract X-ray microscope as an important nanoprobing tool is expected to play a powerful role in nano-inspections of materials. Despite the fast advances of high resolution focusing/imaging reported, the diffraction efficiency of existing binary zone plates as the lenses in the microscope is mostly around 5% in practice and rapidly goes down to 1-2% when the resolution approaches 10 nm, failing its applications in advanced scientific research. Zone plates with Kinoform profile are supposed to be high efficient, little progress for achieving both high resolution and high efficiency has been reported. The conflict between the resolution and the efficiency in X ray optics has become a long-lasting bottleneck in the further development of X-ray microscope. Based on our earlier success in developing high efficiency Kinoform zone plates by greyscale electron beam lithography, we proposed, in this work, a new zone plate structure by combing a dielectric Kinoform zone plate with an atomic layer deposited HfO2 zone plate to achieve high resolution focusing/imaging with high efficiency. Beam propagation method was applied in designing and optimizing Kinoform shapes of the zones, greyscale and/or binary electron beam lithography was carried out for generating both 3D Kinoform as well as rectangular zones with aspect ratio of 23/1 in dielectric resist, and finally high-quality atomic layer deposition of HfO2 was conducted to form the 15-nm wide outermost zone. Optical characterizations by an in-house developed soft X ray microscope demonstrated 15-nm resolution focusing/imaging with over 7% efficiency, which is the highest with such a resolution as far as our awareness. The origin of such an improvement behind the proposed novel lenses is interpreted by our BMP calculation results and the comparisons with existing performances by other reports in literature was discussed.
Performance Test of Fresnel Zone Plate with 50 nm Outermost Zone Width in Hard X-ray Region

Yoshio Suzuki,Akihisa Takeuchi,Hidekazu Takano,Hisataka Takenaka

DOI: https://doi.org/10.1143/jjap.44.1994

IF: 1.5

2005-04-08

Japanese Journal of Applied Physics

Abstract:A microfocusing experiment for hard X-rays has been performed to evaluate the performance of Fresnel zone plate optics. A tantalum Fresnel zone plate with an outermost zone width of 50 nm and a thickness of 0.5 µm has been fabricated by electron-beam lithography. The focused beam size measured by a knife-edge scan is 58 nm in full-width at half-maximum for the first-order diffraction at an X-ray energy of 8 keV. It can be concluded that this zone plate has nearly diffraction-limited resolution in the hard X-ray region. The measured diffraction efficiency is 5% at 8 keV. The spot size using the third-order focus of the zone plate is measured to be approximately 30 nm.

physics, applied
Ion beam lithography for Fresnel zone plates in X-ray microscopy

Kahraman Keskinbora,Corinne Grévent,Michael Bechtel,Markus Weigand,Eberhard Goering,Achim Nadzeyka,Lloyd Peto,Stefan Rehbein,Gerd Schneider,Rolf Follath,Joan Vila-Comamala,Hanfei Yan,Gisela Schütz

DOI: https://doi.org/10.1364/oe.21.011747

IF: 3.8

2013-05-07

Optics Express

Abstract:Fresnel Zone Plates (FZP) are to date very successful focusing optics for X-rays. Established methods of fabrication are rather complex and based on electron beam lithography (EBL). Here, we show that ion beam lithography (IBL) may advantageously simplify their preparation. A FZP operable from the extreme UV to the limit of the hard X-ray was prepared and tested from 450 eV to 1500 eV. The trapezoidal profile of the FZP favorably activates its 2nd order focus. The FZP with an outermost zone width of 100 nm allows the visualization of features down to 61, 31 and 21 nm in the 1st, 2nd and 3rd order focus respectively. Measured efficiencies in the 1st and 2nd order of diffraction reach the theoretical predictions.

optics
Electromagnetic Exploration of Focusing Properties of High-Numerical-aperture Micro-Fresnel Zone Plates

Suqin Xue,Qiang Liu,Tao Liu,Shuming Yang,Pengfei Su,Kang Liu,Bo Tian,Tong Wang

DOI: https://doi.org/10.1016/j.optcom.2018.05.014

IF: 2.4

2018-01-01

Optics Communications

Abstract:Focusing properties of high-numerical-aperture micro-Fresnel zone plates (FZP) have been rigorously investigated at the wavelength from deep ultraviolet to visible based on the combination of the vectorial angular spectrum theory and three-dimensional finite-difference time-domain method. New insights are found. The axial spot size evaluated by full-width-at-half-maximum is in direct proportion to the inverse of the total annulus number. Linearly negative focal shift phenomenon can be observed due to the wavelength dispersion over a finite range of tens of nanometers. A proper wavelength deviation can lead to the maximum focal intensity. A simple method has been demonstrated to probe either multi-focus or a light needle using a composite microstructure based on high-NA FZPs. The findings of this study expand the common understandings of the classic widely-used FZPs.
Studies on Phase Ronchi Gratings and the Fabrication of Soft X-Ray Condenser Zone Plates

Y Liu,J Lou,K Xiao,XD Xu,YL Hong,SJ Fu

DOI: https://doi.org/10.1117/12.574391

2005-01-01

Abstract:Ronchi gratings are widely used as beam splitters in interferometry. The phase Ronchi gratings are fabricated in K9 (or BK7) substrates using a photolithographic process and ion beam etching process. The geometry of the gratings was determined within the approximations of the scalar diffraction theory to minimize their diffraction intensities in 0 and 2 orders at 514.5nm. Their diffractive characteristics are measured using Ar+ laser at 514.5 and 496.5nm. The phase Ronchi gratings exhibit the diffraction intensity in 0 or 2 order to be three orders of magnitude less than that in 1 order. Soft x-ray condenser zone plates are one of the most essential condensing and dispersing elements in the field of soft x-ray microscopy. The zone-plates are used at 3.2nm, whose diameters are 2.8mm. The widths of their outermost zone are 647nm. The zone plate is made of Au. Self-supporting zone plates are fabricated by holography-ion beam etching process to obtain x-ray lithography mask, the x-ray lithography, photolithography and micro electroplating process were used to obtain their self-supporting structure. The self-supporting zone plates are free of membrane absorption and degradation.
Improving Soft X-ray Imaging Contrast Uniformity of 50nm Au Zone Plate by Optimizing Pulse Plating

Kuanqiang Zhang,Lijuan Chen,Chenfei Guo,Xu Ding,Ying Xiong,Yong Guan,Zhao Wu,Yangchao Tian,Gang Liu

DOI: https://doi.org/10.1088/1742-6596/2740/1/012060

2024-01-01

Abstract:The Fresnel zone plate plays a pivotal role in X-ray imaging systems, directly influencing the uniformity of imaging contrast. Achieving uniform imaging contrast imposes stringent requirements on the linewidth and height uniformity of the zone plate. The current mainstream method for zone plate fabrication involves utilizing electron beam lithography in conjunction with electroplating. However, in structures with large aspect ratios, precise deposition of gold to the bottom of the trench through electroplating becomes increasingly challenging to control. In this study, we employed a pulse plating process to enhance the uniformity of the plating height. Detailed investigations were conducted to analyze the effects of pulse current density, pulse duty cycle, and pulse frequency on plating height. Utilizing pulse plating, we successfully fabricated a zone plate with an outermost width of 50 nm and a thickness of approximately 245 nm. Structural analysis showed that the plating height uniformity is improved to better than 5%. The high uniformity imaging pattern was obtained by using the Siemens star test pattern at the soft x-ray imaging station at NSRL. The spatial resolution was down to 50 nm.

Optimum design of aspect ratio limited x-ray zone plates

Design of objective lens with reflective spherical Fresnel zone plate

Design and Fabrication of High Aspect-ratio Hard X-ray Zone Plates

High-efficiency focusing and imaging by dielectric kinoform zone plate lenses with soft X-rays.

Designing of Extended Frsenel Zone Plates for Focusing X-rays

Fabrication of Fresnel zone plates with high aspect ratio by soft X-ray lithography

Interlaced zone plate optics for hard X-ray imaging in the 10 nm range

High-efficiency multilevel zone plates for keV X-rays

A Compound Kinoform/Fresnel Zone Plate Lens with 15 Nm Resolution and High Efficiency in Soft X-Ray.

Fabrication and application of X-ray zone plates

Simulation of an X-ray Fresnel Zone Plate with Nonideal Factors

X-ray Imaging Fresnel Zone Plates and Fabrication

Use of Fractal Zone Plates for Transmission X-ray Microscopy

Fabrication of X-ray Imaging Zone Plates by E-Beam and X-ray Lithography

A study of structural effects on the focusing and imaging performance of hard X‐rays with 20–30 nm zone plates

A dielectric Kinoform zone plate with 15 nm resolution and high efficiency for soft X-ray optics

Performance Test of Fresnel Zone Plate with 50 nm Outermost Zone Width in Hard X-ray Region

Ion beam lithography for Fresnel zone plates in X-ray microscopy

Electromagnetic Exploration of Focusing Properties of High-Numerical-aperture Micro-Fresnel Zone Plates

Studies on Phase Ronchi Gratings and the Fabrication of Soft X-Ray Condenser Zone Plates

Improving Soft X-ray Imaging Contrast Uniformity of 50nm Au Zone Plate by Optimizing Pulse Plating