Structure evolution and mechanical properties of Al-alloyed tantalum diboride films prepared by magnetron sputtering co-deposition
Viktor Šroba,Tomáš Fiantok,Martin Truchlý,Tomáš Roch,Branislav Grančič,Katarína Viskupová,Leonid Satrapinskyy,Peter Švec,Štefan Nagy,Vitalii Izai,Peter Kúš,Marián Mikula
DOI: https://doi.org/10.1116/6.0002390
2023-03-03
Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Abstract:Alloying of transition metal diborides with other metals seems to be a suitable way to maintain their excellent mechanical properties under high-temperature loads. Here, we focus on the perspective tantalum diboride (TaB 2 ) hard film, where we investigate the effect of aluminum alloying on the thermally induced structural evolution and mechanical properties of α-Ta 1−x Al x B 2 using a combination of density functional theory and experiments. Ab initio calculations predict a strong tendency toward the spinodal phase decomposition of the α-TaAlB 2 solid solution into isostructural binaries in the entire concentration range at T = 0 K. However, an increase in temperature (T > 773 K) leads to stabilization of the α-Ta 1−x Al x B 2 solid solution at x < 0.5. The experimental results of magnetron co-sputtered Ta 0.75 Al 0.25 B 2.14 and Ta 0.69 Al 0.31 B 2.16 films with aluminum concentrations of 8 and 12.5 at. %, respectively, confirm the insolubility of aluminum in the TaB 2 phase. The structure has a nanocomposite character formed by α-TaB 2 nanofilaments surrounded by an Al-rich tissue phase. The films are structurally stable up to 1200 °C, but Al atoms already begin to diffuse from the boundary regions when the temperature exceeds 1000 °C. Al alloying causes a decrease in hardness, since the hardness of the reference as-deposited TaB 1.21 , Ta 0.75 Al 0.25 B 2.14, and Ta 0.69 Al 0.31 B 2.16 films is 34, 28, and 27 GPa, respectively. Exposing the films to high temperatures does not lead to a hardening effect; the hardness of Al-depleted films annealed at a temperature of 1200 °C decreased by approximately 10%. The decrease in Young's modulus from 420 GPa (TaB 1.21 ) to 370 GPa (Ta 0.69 Al 0.31 B 2.16 ) indicates a tendency toward the ductile behavior of Al alloyed films under mechanical load.
physics, applied,materials science, coatings & films