High-precision image position sensing methods suitable for 3-D measurement

Masanori Idesawa
DOI: https://doi.org/10.1016/0143-8166(89)90037-7
IF: 5.666
1989-01-01
Optics and Lasers in Engineering
Abstract:A high-precision image position sensing method for a position sensitive detector (PSD) with a kaleidoscopic mirror tunnel (KM-PSM) is introduced. In order to increase the relative resolution of the image position detecting element itself, a hybrid type position sensitive device (R-HPSD) has been invented. A 1-D mark direction sensing method (PM-DSM) which consists of a 1-D image position sensing element, a cylindrical lens and a parallel mirror tunnel is proposed for the realization of a high-precision and miniaturized 3-D position measuring system. Furthermore, an optical range sensing method (RORS), which is suitable for realizing a miniaturized optical range sensing probe based on the triangulation, is proposed.
optics
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