Abstract:Micromechanical and nanomechanical systems with exceptionally low dissipation rates are enabling the next-generation technologies of ultrasensitive detectors and quantum information systems. New techniques and methods for lowering the dissipation rate have in recent years been discovered and allowed for the engineering of mechanical oscillators with phononic modes that are extremely well isolated from the environment and thus possess quality factors close to and beyond 1×109 . A powerful strategy for isolating and controlling a single phononic mode is based on phononic crystal engineering. Here we propose a new method for phononic crystal engineering of nanomechanical oscillators that is based on a periodic variation of the material density. To circumvent the introduction of additional bending losses resulting from the variation of material density, the added mass constitutes an array of nanopillars in which the losses will be diluted. Using this novel technique for phononic crystal engineering, we design and fabricate corrugated mechanical oscillators with quality factors approaching 1×109 in a room temperature environment. The flexibility space of these new phononic crystals is large and further advancement can be attained through optimized phononic crystal patterning and strain engineering via topology optimization. This will allow for the engineering of mechanical membranes with quality factors beyond 1×109 at room temperature. Such extremely low mechanical dissipation rates will enable the development of radically new technologies such as quantum-limited atomic force microscopy at room temperature, ultrasensitive detectors of dark matter, spontaneous waveform collapses, gravity, and high-efficiency quantum information transducers. https://doi.org/10.1103/PhysRevX.14.011039 Published by the American Physical Society under the terms of the Creative Commons Attribution 4.0 International license. Further distribution of this work must maintain attribution to the author(s) and the published article's title, journal citation, and DOI. Published by the American Physical Society

Micromechanical Resonators Based on Silicon Two-Dimensional Phononic Crystals of Square Lattice

A Novel Micromechanical Resonator Using Two-Dimensional Phononic Crystal Slab

Experimental Investigation of a Cavity-Mode Resonator Using a Micromachined Two-Dimensional Silicon Phononic Crystal in a Square Lattice

Development of microfabricated phononic crystal resonators based on two-dimensional silicon slab

Numerical and experimental study on silicon microresonators based on phononic crystal slabs with reduced central-hole radii

Investigation on the optimized design of alternate-hole-defect for 2D phononic crystal based silicon microresonators

Micromechanical Resonators Based on Two-dimensional Phononic Crystal Slabs

Silicon two-dimensional phononic crystal resonators using alternate defects

On‐Chip Tightly Confined Guiding and Splitting of Surface Acoustic Waves Using Line Defects in Phononic Crystals

Experimental verification of phononic crystal slab based silicon microresonators

Experimental demonstration of Fano resonance in microfabricated phononic crystal resonators based on two-dimensional silicon slab

High speed surface acoustic wave and laterally excited bulk wave resonator based on single-crystal non-polar AlN film

Evidence on simultaneous improvement of motional impedance and Q-factor of silicon phononic crystal micromechanical resonators by variously engineering the cavity defects

Topology-optimized 2D Silicon-Air Phononic Crystal Slabs for Enhancing Quality Factor of Laterally Vibrating Resonators

Localized Modes in Asymmetric Phononic Crystals

Quasi-two-dimensional optomechanical crystals with a complete phononic bandgap

Graphene-Based Nanoelectromechanical Periodic Array with Tunable Frequency

Three-Dimensional Finite Element Analysis and Characterization of Quasi-Surface Acoustic Wave Resonators

Honeycomb-Shaped Phononic Crystals on 42°Y-X LiTaO3/SiO2/Poly-Si/Si Substrate for Improved Performance and Miniaturization

Q-enhancement of Piezoelectric Micro-Oven Controlled MEMS Resonators Using Honeycomb Lattice Phononic Crystals

Ultracoherent Nanomechanical Resonators Based on Density Phononic Crystal Engineering