Abstract:Fano resonance, known from atomic physics, has been employed for a wide variety of nanophotonic structures, such as quantum dots, photonic crystal, plasmonics, and metamaterials, and so on. With modal dispersion engineering, Fano filters and reflectors can all be realized in single layer dielectric photonic crystal structures. Based on Fano resonance principle in 2D air hole photonic crystal slabs, combined with crystalline semiconductor nanomembrane transfer printing techniques, we have demonstrated a range of ultra-compact high performacne photonic and electronic devices on silicon and on flexible substrates. By sandwiching InGaAsP quantum well cavity in between two single –layer silicon Fano resonance photonic crystal membrane reflectors (MR), membrane reflector vertical-cavity surface- emitting lasers (MR-VCSELs) were proposed and demonstrated. We will report our recent progresses on this new type of membrane lasers, which can be built on silicon, and on flexible substrates. Ultra-compact high quality factor optical filters have also been realized experimentally, based on Fano resonances in single or coupled bi-layer photonic crystal slabs, without or with lattice displacements. Theoretically, with the control of lattice displacement between two coupled photonic crystal slabs layers, optical filter Q factors can approach 211,000,000 or infinite. Experimentally optical filters with quality factors up to 80,000 have been demonstrated. Finally, we will review other type of Fano resonance based optical structures, such as vertical to in-plane couplers, and beam routing structures, for integrated silicon photonics. The convergence of nanomembranes and Fano resonance photonic crystals offer unprecedented opportunities for unique electronic and photonic devices for 3D multi-functional Si CMOS photonics, flexible, bio-inspired/integrated photonic/electronic systems, and multi-spectral multi-color infrared imaging and sensing systems, etc. The work was supported by US AFOSR, ARO and NSF.

Experimental demonstration of Fano resonance in microfabricated phononic crystal resonators based on two-dimensional silicon slab

Fano Resonances in Ultracompact Waveguide Fabry-Perot Resonator Side-Coupled Lossy Nanobeam Cavities

On‐Chip Tightly Confined Guiding and Splitting of Surface Acoustic Waves Using Line Defects in Phononic Crystals

Tunable Fano Resonances Based on Two-Beam Interference in Microring Resonator

Modulating Acoustic Fano Resonance of Self-Collimated Sound Beams in Two Dimensional Sonic Crystals

Universal Near-Field Interference Patterns of Fano Resonances in Two-Dimensional Plasmonic Crystals

Fano Resonances in A Single Defect Nanocavity Coupled with A Plasmonic Waveguide

Experimental Demonstration of Thermally Tunable Fano and EIT Resonances in Coupled Resonant System on SOI Platform

Resonant Optical Properties of Crystalline Silicon Nanoparticles Fabricated by Laser Ablation-Based Methods

The investigation of point defect modes of phononic crystal for high Q resonance

Fano Resonance Photonic Crystal Membrane Lasers and Filters for Integrated Silicon Photonics

Experimental observation of Fano resonance in a single whispering-gallery microresonator

Silicon Acoustic Waveguide Based on Locally Resonant Phononic Crystal

Fano-resonance in One-Dimensional Topological Photonic Crystal Heterostructure

Tuning Fano Resonances with a Nano-Chamber of Air.

Topology-optimized 2D Silicon-Air Phononic Crystal Slabs for Enhancing Quality Factor of Laterally Vibrating Resonators

Coupled resonator acoustic waveguides-based acoustic interferometers designed within two-dimensional phononic crystals: experiment and theory

WS2 Monolayer in Fabry–Perot Cavity Support for Plasmonic Fano Resonance

Fano resonance from a one-dimensional topological photonic crystal

Two-dimensional valley photonic crystal resonant cavities

Study of Acoustic Wave Behavior in Silicon-Based One-Dimensional Phononic-Crystal Plates Using Harmony Response Analysis